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ABBElectro-Pneumatic Positioner TZIDC

From:ABB | Author:LIAO | Time :2025-08-27 | 568 Browse: | 🔊 Click to read aloud ❚❚ | Share:

Low operating cost 

Compact design 

Well-proven technology 

Robust and environmentally ruggedized 

Wide operating temperature range 

 -40 ... 85 °C (-40 ... 185 °F) 

Easy to commission, “single pushbutton” 

operating philosophy 

Mechanical position indicator 

ATEX, FM, CSA, GOST and IECEx approvals 

For SIL2 safety loops 

1 Description Pos: 3.2 /==== Wechsel ein- auf zweispaltig ==== @ 0mod_1130421847171_3101.doc @ 3828 

Wechsel ein-auf zweispaltig Pos: 3.3 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/Allgemein/Kurzbeschreibung/Kurzbeschreibung @ 10mod_1173180169769_3101.doc @ 71118 

The TZIDC is an electronically configurable positioner with 

communication capabilities designed for mounting to pneumatic 

linear or rotary actuators. It features a small and compact design, a 

modular construction, and an excellent cost-performance ratio. 

Fully automatic determination of the control parameters and 

adaptation to the final control element yield considerable time savings 

and an optimal control behavior. 

Pos: 3.4 /Überschriften/1.1/2-spaltig/Pneumatik @ 10mod_1176211138453_3101.doc @ 76683 

1.1 Pneumatics Pos: 3.5 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/Allgemein/Kurzbeschreibung/Pneumatik @ 10mod_1173180645393_3101.doc @ 71139 a 

An I/P module with subsequent pneumatic amplifier is used to control 

the pneumatic actuator. The well-proven I/P module proportionally 

converts the permanent electrical positioning signal from the CPU 

into a pneumatic signal used to adjust a 3/3-way valve. 

The air flow for pressurizing or depressurizing the actuator is 

continuously adjusted. As a result, excellent control is achieved. 

When reaching the set point, the 3/3-way valve is closed in center 

position to minimize the air consumption. 

Four different pneumatics versions are available: for single-acting or 

double-acting actuators, each with “fail-safe” or “fail-freeze” function. 

Pos: 3.6 /Überschriften/1.1.1/2-spaltig/Sicherheitsfunktion "entlüftend" @ 10mod_1176211744343_3101.doc @ 76809 

1.1.1 “Fail-safe” function 

Pos: 3.7 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/Allgemein/Kurzbeschreibung/Sicherheitsfunktion "entlüftend" @ 10mod_1176211673796_3101.doc @ 76788 

If the electrical power supply fails, the positioner output 1 is 

depressurized, and the pneumatic actuator’s return spring moves the 

valve to the defined safe position. In case of a double-acting actuator 

the second output 2 is additionally pressurized. 

Pos: 3.8 /======= Spaltenumbruch ======== @ 0mod_1132937966324_3101.doc @ 3831 

Pos: 3.9 /Überschriften/1.1.1/2-spaltig/Sicherheitsfunktion "blockierend" @ 10mod_1176211798765_3101.doc @ 76830 

1.1.2 “Fail-freeze” function 

Pos: 3.10 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/Allgemein/Kurzbeschreibung/Sicherheitsfunktion "blockierend" @ 10mod_1176211845484_3101.doc @ 76851 

If the electrical power supply should fail, the positioner output 1 (and 

2, if applicable) is closed and the pneumatic actuator stops 

(“freezes”) the valve in the current position. If compressed air supply 

should fail, the positioner depressurizes the actuator. 

Pos: 3.11 /Überschriften/1.1/2-spaltig/Bedienung @ 10mod_1176211172234_3101.doc @ 76704 

1.2 Operation Pos: 3.12 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/Allgemein/Kurzbeschreibung/Bedienung (Kommunikationsmöglichkeit) @ 10mod_1173184631054_3101.doc @ 71160 

The positioner has a built-in operating panel providing a 2-line LCD 

and 4 pushbuttons for optimal local configuration, commissioning and 

operational monitoring. 

Alternatively, the appropriate configuration program and the available 

communication option can be used. 

Pos: 3.13 /Überschriften/1.1/2-spaltig/Kommunikation @ 10mod_1176211201546_3101.doc @ 76725 

1.3 Communication Pos: 3.14 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/TZIDC / TZIDC-200/Kurzbeschreibung/Kommunikation @ 10mod_1176212225390_3101.doc @ 76893 

The standard TZIDC model has a local communication interface (LKS 

connector). Additionally, a “HART communication” option for 

communication via the 20 mA signal is available. Both 

communications are based on the HART Protocol. 

Pos: 3.15 /Überschriften/1.1/2-spaltig/Ein-/Ausgänge @ 10mod_1176211233015_3101.doc @ 76746 

1.4 Inputs and outputs Pos: 3.16 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/TZIDC / TZIDC-200/Kurzbeschreibung/Ein-/Ausgänge @ 10mod_1176212290390_3101.doc @ 76914 

In addition to its input for the analog position set point the TZIDC 

positioner is equipped with a digital input which can be used to 

activate various protective functions in the device via the process 

control system. A digital output allows you to output collective alarms 

or fault messages. 

Pos: 3.17 /Überschriften/1.1/2-spaltig/Modularer Aufbau @ 10mod_1176211317984_3101.doc @ 76767 

1.5 Modular design Pos: 3.18 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/Allgemein/Kurzbeschreibung/ModularerAufbau @ 10mod_1173184783043_3101.doc @ 71181 q 

The TZIDC basic model can be enhanced at any time by retrofitting 

optional equipment. Option modules for analog or digital position 

feedback or a shutdown-module can be installed. Additionally, a 

mechanical position indicator, proximity switches or 24 V 

microswitches are available for indicating the position independently 

of the mother board function

Electro-Pneumatic Positioner TZIDC 10/18-0.22-EN 

for 4 … 20 mA two-wire technology

Basic model Optional upgrades 

1 LKS plug 9 Plug module for analog feedback (4 … 20 mA) 

2 Positioning signal 4 … 20 mA 10 Plug-in module for safety shutdown (forced depressurization) 

3 Digital input 11 Plug module for digital feedback 

4 Digital output DO 12 Installation kit for mechanical position indicator 

5 Supply, 1.4 … 6 bar 13 Installation kit for digital feedback with proximity switches 

6 Exhaust 14 Installation kit for digital feedback with 24 V microswitches 

7 I/P module with 3/3-way valve 

8 Position sensor (optional up to 270° rotation angle) 

Important 

With optional upgrades either the “Installation kit for digital feedback with proximity switches” (13) or the “Installation 

kit for digital feedback with microswitches 24 V” (14) can be used. 

In both cases, the “mechanical position indicator” (8) must be installed. 

2 Mounting versions Pos: 5.2 /==== Wechsel ein- auf zweispaltig ==== @ 0mod_1130421847171_3101.doc @ 3828 

Wechsel ein-auf zweispaltig Pos: 5.3 /Überschriften/1.1/2-spaltig/Genormter Anbau an pneumatische Linearantriebe @ 10mod_1176212852312_3101.doc @ 76956 

2.1 To linear actuators in accordance with the 

standard Pos: 5.4 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/Allgemein/Montage/Genormter Anbau an pneumatische Linearantriebe @ 10mod_1176213091968_3101.doc @ 77040 

Lateral attachment is in accordance with DIN / IEC 534 (lateral 

attachment to NAMUR). The required attachment kit is a complete 

set of attachment material, but does not include the screwed pipe 

connections and air pipes. 

Pos: 5.5 /Überschriften/1.1/2-spaltig/Genormter Anbau an pneumatische Schwenkantriebe @ 10mod_1176212899953_3101.doc @ 76977 

2.2 To rotary actuators in accordance with the 

standard Pos: 5.6 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/Allgemein/Montage/Genormter Anbau an pneumatische Schwenkantriebe @ 10mod_1176213146937_3101.doc @ 77061 

This attachment is designed for mounting according to the standard 

VDI/VDE 3845. The attachment kit consists of a console with 

mounting screws for mounting on a rotary actuator. The adapter for 

coupling the positioner feedback shaft to the actuator shaft has to be 

ordered separately. Screwed pipe connections and air pipes have to 

be provided on site. 

Pos: 5.7 /======= Spaltenumbruch ======== @ 0mod_1132937966324_3101.doc @ 3831 

Pos: 5.8 /Überschriften/1.1/2-spaltig/Integrierter Anbau an Regelventile @ 10mod_1176212940421_3101.doc @ 76998 

2.3 Integral mounting to control valves Pos: 5.9 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/Allgemein/Montage/Integrierter Anbau an Regelventile, TZIDC-1x0 @ 10mod_1176213402234_3101.doc @ 77103 

The TZIDC positioner featuring standard pneumatic action is also 

suitable for integral mounting. 

The required holes are found at the back of the device. 

The benefit of this design is that the point for mechanical stroke 

measurement is protected and that the positioner and actuator are 

linked internally. No external tubing is required. 

Pos: 5.10 /Überschriften/1.1/2-spaltig/Besondere antriebsspezifische Anbauversionen @ 10mod_1176212991062_3101.doc @ 77019 

2.4 Special actuator-specific mounting Pos: 5.11 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/Allgemein/Montage/Besondere antriebsspezifische Anbauversionen @ 10mod_1173186727709_3101.doc @ 71265 

In addition to the mounting methods described above, there are 

special actuator-specific attachments. 

Please contact us for details. 

Electro-Pneumatic Positioner TZIDC 10/18-0.22-EN 

Fig. 2: Mounting options 

1 Mounting to linear actuators acc. to DIN / IEC 534 3 Integral mounting to control valves 

2 Mounting to rotary actuators to VDI / VDE 3845 4 Integral mounting to control valves by using an adapter panel 

3 Operation Pos: 7.2 /==== Wechsel ein- auf zweispaltig ==== @ 0mod_1130421847171_3101.doc @ 3828 

Wechsel ein-auf zweispaltig Pos: 7.3 /Überschriften/1.1/2-spaltig/Allgemeines @ 10mod_1176213970765_3101.doc @ 77124 A 

3.1 General Pos: 7.4 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/Allgemein/Betrieb/Allgemeines @ 10mod_1176214294328_3101.doc @ 77292 

Microprocessor-based position control in the TZIDC provides for 

optimal results. The positioner features high-precision control 

functions and high operational reliability. Due to their elaborate 

structure and easy accessibility, the device parameters can be 

quickly adapted to the respective application. 

The total range of parameters includes: 

- Operating parameters 

- Adjustment parameters 

- Monitoring parameters 

- Diagnosis parameters 

- Maintenance parameters 

Pos: 7.5 /Überschriften/1.1.1/2-spaltig/Betriebsparameter @ 10mod_1176214001500_3101.doc @ 77145 

3.1.1 Operating parameters 

Pos: 7.6 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/TZIDC / TZIDC-200/Betrieb/Betriebsparameter @ 10mod_1176214346265_3101.doc @ 77343 

The following operating parameters can be set manually if required: 

Signal 

Signal min. 4 mA, max. signal 20 mA (0 ... 100 %) 

freely selectable for split-range operation 

min. range 20 % (3.2 mA) 

recommended range > 50 % (8.0 mA) 

Action (positioning signal) 

Increasing: Signal 4 ... 20 mA = position 0 ... 100 % 

Increasing: Signal 20 ... 4 mA = position 0 ... 100 % 

Characteristic curve (travel = f {signal}) 

Linear, equal percentage 1:25 or 1:50 or 25:1 or 50:1 or freely 

configurable with 20 reference points. 

Travel limit 

The positioning travel, i.e. the stroke or angle of rotation, can be 

reduced as required within the full range of 0 ... 100 %, provided that 

a minimum value of 20 % is observed. 

Shut-off function 

This parameter can be set separately for each end position. When 

the respective configured limit value is exceeded, the shut-off 

function causes immediate travel of the actuator until reaching the set 

end position. 

When the shut-off value is set to “0”, the position is further controlled, 

even in the respective end position. 

Travel time prolongation 

This function can be used to increase the max. travel time for full 

travel. This time parameter can be set separately for each direction. 

Important 

This function can only be used with the pneumatics with the 

safety function “fail-safe”. 

Switching points for the position 

This parameter allows you to define two position limits for signaling 

(see option “Module for digital position feedback”). 

Digital output 

The alarms generated in the TZIDC positioner can be polled via the 

digital output as a collective alarm. 

The desired information can be selected via the operator panel or 

remotely via the configuration program. 

The output can be set to “active high” or “active low”, as required. 

Digital input 

For the digital input, one of the following safety options can be 

selected. You may use the operator’s panel or configuration program 

to select an option. 

- No function (default) 

- Move to 0 % position 

- Move to 100 % position 

- Hold previous position 

- disable local configuration 

- Disable local configuration and operation 

- Disable any access (no local or remote access via a PC) 

The selected function is activated once the 24 V DC signal is no 

longer applied (< 11 V DC). 

Pos: 7.7 /Überschriften/1.1.1/2-spaltig/Justageparameter @ 10mod_1176214036515_3101.doc @ 77166 

3.1.2 Adjustment parameters 

Pos: 7.8 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/TZIDC / TZIDC-200/Betrieb/Justageparameter @ 10mod_1176214397515_3101.doc @ 77364 

The TZIDC positioner has a special function for automatic adjustment 

of the parameters. 

Additionally, the control parameters can be set automatically (in 

adaptive control mode) or manually to optimally adapt them to the 

process requirements. 

Tolerance band 

When reaching the tolerance band the position is considered as 

corrected. From this point on, the position is further slowly readjusted until the dead band is reached. The factory setting for this 

parameter is 0.3 %. 

Dead band (sensitivity) 

When reaching the dead band, the position is held. The factory 

setting for this parameter is 0,1 %. 

Actuator spring action 

Selection of the sensor shaft rotating sense (looking into the open 

case), if the valve is moved to the safe position by the actuator spring 

(actuator is depressurized via Y1/OUT1). 

For double-acting actuators the actuator spring action corresponds to 

pressurizing the pneumatic output (OUT2). 

Display 0 ... 100 % 

Adjusting the display (0 ... 100 %) according to the direction of action 

for opening or closing the valve. 

Pos: 7.9 /Überschriften/1.1.1/2-spaltig/Betriebsüberwachungsparameter @ 10mod_1176214071453_3101.doc @ 77187 

3.1.3 Monitoring parameters 

Pos: 7.10 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/TZIDC / TZIDC-200/Betrieb/Betriebsüberwachungsparameter @ 10mod_1176214447375_3101.doc @ 77385 B 

Various functions for permanent operational monitoring are 

implemented in the TZIDC operating program. The following states 

will be detected and indicated, e.g.: 

- 4 ... 20 mA signal out of range 

- position out of the adjusted range 

- positioning time-out (adjustable time parameter) 

- position controller inactive 

- counter limits (settable in the diagnosis phase) exceeded 

While automatic commissioning is in progress, the current state is 

continuously indicated on the integrated LCD. 

During operation, the LCD shows the most important process 

variables: 

- current position (in %), 

- malfunctions, alarms, messages (as code) 

Access to extended monitoring parameters is possible via HART 

communication and the DTM. 

3.1.4 Diagnosis parameters 

Pos: 7.13 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/Allgemein/Betrieb/Diagnoseparameter @ 10mod_1176214500906_3101.doc @ 77406 

The diagnosis parameters of the TZIDC program inform the operator 

about the operating conditions of the valve. 

From this information the operator can derive which maintenance 

works are required, and when. 

Additionally, limit values can be defined for these parameters. When 

they are exceeded, an alarm is reported. 

The following values are e.g. determined: 

- Number of movements performed by the valve 

- Total travel 

The diagnosis parameters and limit values can be called up, set, and 

reset via HART communication, using the configuration program. 

Pos: 7.14 /Überschriften/1.1/2-spaltig/Bedienpanel @ 10mod_1176214143953_3101.doc @ 77229 

3.2 Operator panel Pos: 7.15 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/Allgemein/Betrieb/Bedienpanel TZIDC-1x0 @ 10mod_1176214815500_3101.doc @ 77427 

The TZIDC positioner’s operator panel with four pushbuttons allows 

for 

- operational monitoring 

- manual control 

- configuration 

- fully automatic commissioning 

The operator panel is protected by a cover which avoids 

unauthorized access to the operating elements. 

Pos: 7.16 /======= Spaltenumbruch ======== @ 0mod_1132937966324_3101.doc @ 3831 

Pos: 7.17 /Überschriften/1.1.1/2-spaltig/Ein-Tasten-Inbetriebnahme @ 10mod_1176214193156_3101.doc @ 77250 

3.2.1 Single-button commissioning 

Pos: 7.18 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/TZIDC / TZIDC-200/Betrieb/Ein-Tasten-Inbetriebnahme @ 10mod_1176214842843_3101.doc @ 77448 

Commissioning the TZIDC positioner is especially easy. The 

standard Autoadjust function for automatic adaptation of the device 

parameters can be started by simply pressing a single front panel 

button, and without knowing parameterization details. 

Depending on the selected actuator type (linear or rotary), the 

displayed zero position is automatically adapted: 

- for linear actuators counter-clockwise (CTCLOCKW) 

- for rotary actuators clockwise (CLOCKW). 

Besides this standard function, a customized “Autoadjust” function is 

available. The function is launched either via the operator’s panel or 

HART communication. 

Pos: 7.19 /Überschriften/1.1.1/2-spaltig/Anzeigen @ 10mod_1176214259859_3101.doc @ 77271 

3.2.2 Display 

Pos: 7.20 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/TZIDC / TZIDC-200/Betrieb/Anzeigen @ 10mod_1176214873937_3101.doc @ 77469 

The information indicated by the 2-line LC display is permanently 

updated and adapted during operation, to inform the operator in an 

optimal way. 

During control operation (control with or without adaptation) the 

following TZIDC data can be called up by pressing the pushbuttons 

briefly: 

- Up button: Current setpoint (mA) 

- Down button: Temperature in device 

- Up + Down buttons: Current control deviation 

4 Communication Pos: 9.2 /==== Wechsel ein- auf zweispaltig ==== @ 0mod_1130421847171_3101.doc @ 3828 

Wechsel ein-auf zweispaltig Pos: 9.3 /Überschriften/1.1/2-spaltig/DTM @ 10mod_1176215310421_3101.doc @ 77511 

4.1 DTM Pos: 9.4 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/TZIDC / TZIDC-200/Kommunikation/DTM @ 10mod_1176215507046_3101.doc @ 77595 

The DTM (Device Type Manager) for TZIDC is based on the 

FDT/DTM technology (FDT 1.2) and can be integrated in a process 

control system or loaded in a PC with the DSV401 (SMART VISION) 

program. This allows you to work with the same user interface in the 

commissioning phase, during operation, and for service tasks for 

monitoring the device, setting parameters, and uploading data. 

Communication is based on the HART protocol. It occurs via a local 

interface connection (LKS) or in frequency-modulated mode using an 

FSK-modem connected at any chosen point of the 20 mA signal line. 

Communication has no effect on operation. Newly set parameters are 

saved in the non-volatile memory directly upon the download into the 

device, and become active immediately. 

Pos: 9.5 /Überschriften/1.1/2-spaltig/LKS-Adapter (RS-232 Schnittstellenwandler) @ 10mod_1176215338250_3101.doc @ 77532 

4.2 LKS adapter (RS-232 interface converter) Pos: 9.6 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/TZIDC / TZIDC-200/Kommunikation/LKS-Adapter (RS-232 Schnittstellenwandler) @ 10mod_1176215612828_3101.doc @ 77616 

You can easily connect your TZIDC positioner to a PC, e.g., in the 

workshop or in the commissioning phase, by using the positioner’s 

LKS adapter (LKS = local communication interface). 

An RS-232 interface converter adapts the signals on the serial PC 

port to the level of the positioner’s LKS. 

Pos: 9.7 /Überschriften/1.1/2-spaltig/FSK-Modem @ 10mod_1176215390421_3101.doc @ 77553 

4.3 FSK Modem Pos: 9.8 /Technische Daten / Datenblatt/Aktorik/Stellungsregler/TZIDC / TZIDC-200/Kommunikation/FSK-Modem @ 10mod_1176215656328_3101.doc @ 77637 

The FSK modem establishes a digital frequency-modulated 

communication (Frequency Shift Keying) with the TZIDC positioner. 

Tapping is possible at any chosen point of the 20 mA signal line. 

We recommend that you use an electrically isolated FSK modem. It is 

bus-compatible when used with isolating amplifiers. Even connecting 

explosion-protected field devices is possible, on condition that the 

FSK modem is run outside the hazardous area.


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  • Applied Materials (AMAT) 0100-09137 High-Performance VME Control Module
  • Applied Materials (AMAT) 0100-09054 Precision Analog Input Board
  • Applied Materials (AMAT) 0100-09029 Turbo Interconnect Interface Module
  • AMAT 0100-03391 Precision Semiconductor Control
  • AMAT 0100-01984 | VME System Interface & Logic Controller Board
  • AMAT 0100-01363 | VME Intelligent System Control & I/O Board
  • AMAT 0100-01321 | VME DeviceNet Scanner / Interface Board
  • AMAT 0100-00793 | VME Multi-Channel Interface & Logic Board
  • AMAT 0100-00689 | VME PCB Power Module
  • AMAT 0100-00580 | VME Intelligent System Controller Board
  • AMAT 0100-00523 | VME Multi-Channel Analog-to-Digital (A/D) Board
  • AMAT 0100-00493 | VME Multi-Function System Controller Board
  • AMAT 0100-00398 | VME Interface System Control Board
  • AMAT 0100-00369 | VME 12-Channel High-Speed Stepper Motor Controller
  • ​AMAT 0100-00196 | VME System Mainframe CPU Controller Board
  • AMAT 0100-00169 | VME 12-Channel Stepper Motor Controller Board
  • AMAT 0100-00162 | VME Dual Channel Serial Communication Board
  • AMAT 0100-00137 | VME Stepper Motor Controller Interface Board
  • AMAT 0100-00075 | VME Digital Input/Output (DI/O) Interface Board
  • AMAT 0100-00007 VME Analog Input/Output Interface Board
  • AMAT 0100-00002 | VME Slave I/O Interface PCB
  • AMAT 0090-05596 High-Voltage DC Power Cable Assembly
  • AMAT 0090-01809 | High-Performance RF Power Cable Assembly
  • AMAT 0010-29958 | CCM HART 3 Mainframe Control Assembly
  • AMAT 0010-20003 System Controller Card Cage Assembly
  • AMAT 0010-11239 PVD High-Voltage Power Interface Assembly
  • AMAT 0010-09416 RF Matching Network Assembly
  • AMAT 0010-00019 Analog Power Supply Assembly
  • AMAT AS00009-02 (31-000-00940) | Precision Semiconductor Component
  • AMAT 0010-00028 Power Supply Module
  • AMAT 0330-1586A Serial Communication PCB
  • AMAT 0190-09690 Seriplex SENSORbus SPX-MUXADIO-001
  • AMAT 0190-04397 DeviceNet I/O Interface Board
  • AMAT 0190-02506 DeviceNet I/O Interface Card
  • AMAT 0090-00475 Seriplex 210 MUXADIO
  • AMAT 410-0198-1 Multi-Output Switching Power Supply
  • AMAT 0100-20458 high-reliability Configurable Interlock Personality Board
  • AMAT VAS104350-0415 Gasline Heater Control Unit
  • AMAT VME6U1V2 VMEbus Backplane Interface Module
  • AMAT 0920-01070 high-performance RF Power Generator
  • AMAT 0090-76133A VME Single Board Computer (SBC)
  • AMAT 0190-24115 DeviceNet I/O Interface Card
  • AMAT 0190-37607 Backplane / Base Board Assembly
  • AMAT 0190-32372 Analog Input/Output (I/O) Board
  • AMAT 0190-09956 Loadlock Interface PCB Base Assembly
  • AMAT 0190-07908 four-channel DeviceNet Interface Card
  • AMAT 0190-07905 (UPS) control board
  • AMAT 0190-07502 Precision Controller / Interface Board
  • AMAT 0190-03680 I/O Backplane
  • AMAT 0190-02200 Water Leak Detection Control Board
  • AMAT 0100-76124 Digital I/O Board Assembly
  • AMAT 0100-35563 Leak Detector Configuration PCB
  • AMAT 0100-35250 Chamber Interface DPS Centura PCB
  • AMAT 0100-35124 Seriplex I/O Distribution Board
  • AMAT 0100-35058 Loadlock Interlocks PCB
  • AMAT 0100-20213 RF Match Detector PCB
  • AMAT 0100-20063 Interface PCB Assembly
  • AMAT 0100-09225 TC AMP/INTERLOCK PCB
  • AMAT 0100-09153 Gas Panel Interface PCB
  • AMAT 0100-09127 Loader Interconnect Board
  • AMAT 0100-09009 Buffer I/O PCB Card
  • AMAT 0100-02813 Signal Conditioning Board
  • AMAT 0100-01911 AC Gas Heater Control Board