AMAT 0190-72235 Viking Valve / Diaphragm Valve

AMAT 0190-72235 is a high-precision Viking Valve Assembly used in Applied Materials semiconductor processing equipment.

It is a critical fluid delivery component designed to manage the flow of ultra-pure chemicals,

gases, or deionized water within the delivery manifolds of chemical mechanical polishing (CMP) and cleaning modules.

Technical Parameter Table

The 0190-72235 is often part of a larger manifold assembly or used alongside these components:

0190-72234: Single-stage variation or different fitting size.

0190-35324: AMAT Manifold Valve Block.

0010-75122: Fluid delivery module for Mirra/Reflexion systems.

0190-01441: Verity/Viking style pneumatic actuator.

Application Cases

This valve is most commonly found in the AMAT CMP (Chemical Mechanical Polishing) platforms:

Reflexion / Reflexion LK: Used in the polishing head fluid lines and slurry delivery systems.

Mirra Mesa: Integrated into the cleaner module for precise chemical dosing during wafer rinsing.

Slurry Manifolds: Controlling the flow of abrasive slurries to the polishing platen where precise timing is required to maintain removal rates.

Product Advantages and Features

Contamination Control: Constructed with PFA wetted parts to ensure zero metal-ion contamination in the process stream.

Fast Response Time: Pneumatic actuation allows for rapid cycling, essential for pulsed chemical delivery and precise volume control.

Corrosion Resistance: The outer housing and internal diaphragms are designed to withstand aggressive acids, bases, and abrasive slurries.

Compact Footprint: Part of the "Viking" series, known for a slim profile that allows high-density mounting on fluid manifolds.

Other Models in the Same Series

AMAT 0190-722xx Series: Includes various port configurations (2-way, 3-way) and different mounting brackets specialized for specific tool generations.

Viking II / Viking III: Successive generations of this valve architecture offering improved diaphragm life and seal integrity.

Installation and Maintenance

Installation: Ensure that the pneumatic pilot lines are free of debris before connection. Use a torque wrench for Flaretek fittings to prevent over-tightening, which can deform the PFA seat.

Orientation: Can be mounted in any orientation, though vertical mounting is preferred in slurry applications to prevent sediment buildup in the valve body.

Maintenance: Regularly inspect the diaphragm for signs of fatigue or "cold flow." 

In slurry applications, a periodic flush cycle is recommended to prevent the drying of abrasive particles which can scar the valve seat.

Unique Product Description

The AMAT 0190-72235 represents the gold standard in high-purity fluid handling.

Unlike standard industrial valves, this assembly is engineered specifically for the "wet-end" of semiconductor fabrication.

Its design minimizes "dead legs" (areas where fluid can stagnate), ensuring that every wafer is treated with fresh, uncontaminated chemistry.

It is an essential spare part for maintaining the process repeatability required for sub-10nm node manufacturing.