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MOOGUser Manual M3000® Automation System MSC II (Moog Servo Controller)

From:MOOG | Author:LIAO | Time :2025-08-20 | 661 Browse: | 🔊 Click to read aloud ❚❚ | Share:

1 General Information

1.1 About this Manual

This manual is valid only for the M3000 About this Manual ® automation system and M3000®

modules. It contains most important instructions that must be observed in order to operate the M3000® automation system and M3000® modules in a

safe manner.

Every person responsible for machinery planning, mounting, and operation

must read, understand, and follow all points covered in this manual. This applies especially to the safety instructions. Following the safety instructions

helps to avoid accidents, faults, and material damage!

Using M3000® Safely 

(Prerequisites)

The following items must be observed as fundamental elements of safety

when using the M3000® automation system and M3000® modules:

• All safety instructions contained in this manual 

• All safety instructions contained in the documentation of the M3000®

modules

• All safety instructions contained in the product related hardware and 

software documentation required for the relevant application

• All relevant nationally and internationally applicable safety and accident 

prevention regulations and standards

1.1.1 Reservation of Changes and Validity

Reservation of Changes 

and Validity for this 

Manual

The information contained in this manual is valid at the time of this version's

release. See footer for version number and release date of this manual.

Moog reserves the right to make changes to this manual at any time without

specified reasons.

1.1.2 Exclusion of Liability

This manual was prepared with great care and the contents reflect the authors' best knowledge. However, the possibility of error remains and improvements are possible.

Please feel free to submit any comments regarding errors or incomplete information to Moog.

Exclusion of Liability for 

this Manual

Moog does not offer any guarantee that the contents conform to applicable

legal regulations nor does Moog accept any liability for incorrect or incomplete information and the consequences thereof.

1.1.3 Completeness

Completeness of this 

Manual

This manual is complete only when used in conjunction with the product related hardware and software documentation required for the relevant application.

1.1.4 Place of Storage

Place of Storage 

for this Manual

This manual and all other associated documentation for hardware and software must always be kept in a location where they will be readily accessible

and close to the M3000® automation system and M3000® modules or the

equipment in which they are installed

1.2 Selection and Qualification of Personnel

Only qualified users may work with and on the M3000 Qualified Users ® automation system or M3000® modules.

Qualified users are properly trained experts with the required knowledge and

experience. In particular, these experts must have the authorization to bring

into operation, ground, and label devices, systems, and power circuits in accordance with safety engineering standards. Those people working on a

project must be familiar with safety concepts common in automation.

1.3 Proper Use

The M3000 Proper Use ® modular automation system is suitable for control applications in

the medium to high end performance ranges.

M3000® is designed for use within the overvoltage category defined by

IEC 60364-4-44 for controlling machines and industrial processes in low voltage systems in which the rated supply voltage does not exceed 1,000 V alternating current (50/60 Hz) or 1,500 V direct current.

Qualified project planning and design, proper transportation, storage, installation, and use are required to ensure fault-free, reliable, and safe operation of

M3000®.

M3000® and M3000® modules must not be brought into operation until it has

been ensured that the equipment in which they are installed complies with the

current version of the EU machinery directive.

The M3000® automation system and M3000® modules may be used only under the conditions and situations specified in this manual and in the documentation of the M3000® modules.

Any other or more extensive use is not permissible.

The following are also required for proper use:

• Compliance with the requirements detailed in this manual

• Compliance with the requirements of individual M3000® module documentation

• Compliance with all of the product related hardware and software documentation required for the relevant application

• Compliance with the relevant nationally and internationally applicable 

regulations, standards, and directives, e.g., the regulations specified by 

a professional organization, such as TÜV or VDE

1.3.1 Safety Related Systems

Safety Related Systems 

Special measures are required to use control technology in safety related

systems.

When planning to use control technology in a safety related system, the user

should seek detailed advice in addition to any available standards or guidelines for safety installations.

WARNING As with any electronic automation system, the failure of

certain components when using M3000® or M3000® modules might lead to an uncontrolled and/or unpredictable

operational condition. The user should take into consideration the system level effects of all types of failures

  • Applied Materials (AMAT) 0190-04098 | 5.X Factory Interface I/O Distribution Board
  • Applied Materials (AMAT) 0190-03705 | MF Producer SE/E Interlock Module
  • Applied Materials (AMAT) 0190-02748 | Flex Scanner Transition Module
  • Applied Materials (AMAT) 0190-02362 | Mainframe Interlock 1 Relay Module
  • Applied Materials (AMAT) 0190-01227 | Intelligent Motor Control OMS Board
  • Applied Materials (AMAT) 0190-00318 | VME 486 Video Controller
  • Applied Materials (AMAT) 0130-14007 | Advanced RF Signal Assembly
  • Applied Materials (AMAT) 0130-14005 | RF Cable/Interface Assembly
  • Applied Materials (AMAT) 0130-01218 | High-Efficiency RF Interface Controller
  • Applied Materials (AMAT) 0110-77040 | Head Pneumatic Controller
  • Applied Materials (AMAT) 0110-00077 | Precision Control Module
  • AMAT 0101-57015 high-performance Next-Generation Deflection Amplifier Board
  • AMAT 0100-77040 critical Head Pneumatic Controller Board
  • AMAT 0100-76291 Data Buffer / Memory Expansion Interface
  • AMAT 0100-76290 Advanced I/O Interface Board
  • AMAT 0100-76269 Control Board / Interface Module
  • AMAT 0100-71462-01 high-performance Process Controller PCB
  • AMAT 0100-71171 Chamber Interlock Control PCB
  • AMAT 0100-71154 Semiconductor Circuit Board / Electronic Group Card
  • AMAT 0100-70034 PCB Assembly (PCBA) for Endpoint VGA I/O Interconnect.
  • AMAT 0100-38032 ESC (Electrostatic Chuck) Controller PCB
  • AMAT 0100-36035 DPS Source Match / Seriplex I/O Distribution PCB
  • AMAT 0100-35231 Seriplex I/O Distribution Module
  • AMAT 0100-35217 TC Amp Interlock PCB Module
  • AMAT 0100-35065 High-Precision Serial Isolator PCB
  • AMAT 0100-35054 Advanced Chamber Interface Module
  • AMAT 0100-20453 DeviceNet Digital I/O Interface Board
  • AMAT 0100-20100 High-Performance Semiconductor Component
  • AMAT 0100-20068 Precision CCD Image Control Board
  • AMAT 0100-20064 Advanced Semiconductor Control Module
  • Applied Materials (AMAT) 0100-20018 Advanced Communication Interface Module
  • Applied Materials (AMAT) 0100-20016 High-Performance Interface and Control Module
  • Applied Materials (AMAT) 0100-20003 Digital I/O (DI/DO) Interface Board
  • Applied Materials (AMAT) 0100-20001 System Electronics Interface (SEI) / PCB Assembly
  • Applied Materials (AMAT) 0100-11030 Chamber Hardware / Gas Distribution Component
  • Applied Materials (AMAT) 0100-11022 Semiconductor Board Card
  • Applied Materials (AMAT) 0100-11018 Advanced Interface Control Module
  • Applied Materials (AMAT) 0100-11001 Precision Analog Output Board
  • ​Applied Materials (AMAT) 0100-11000 High-Precision Analog Input Board
  • Applied Materials (AMAT) 0100-09237 Advanced Signal Interface Module
  • Applied Materials (AMAT) 0100-09204 Advanced Digital Interface Control Board
  • Applied Materials (AMAT) 0100-09172 High-Density Digital I/O Control Board
  • Applied Materials (AMAT) 0100-09137 High-Performance VME Control Module
  • Applied Materials (AMAT) 0100-09054 Precision Analog Input Board
  • Applied Materials (AMAT) 0100-09029 Turbo Interconnect Interface Module
  • AMAT 0100-03391 Precision Semiconductor Control
  • AMAT 0100-01984 | VME System Interface & Logic Controller Board
  • AMAT 0100-01363 | VME Intelligent System Control & I/O Board
  • AMAT 0100-01321 | VME DeviceNet Scanner / Interface Board
  • AMAT 0100-00793 | VME Multi-Channel Interface & Logic Board
  • AMAT 0100-00689 | VME PCB Power Module
  • AMAT 0100-00580 | VME Intelligent System Controller Board
  • AMAT 0100-00523 | VME Multi-Channel Analog-to-Digital (A/D) Board
  • AMAT 0100-00493 | VME Multi-Function System Controller Board
  • AMAT 0100-00398 | VME Interface System Control Board
  • AMAT 0100-00369 | VME 12-Channel High-Speed Stepper Motor Controller
  • ​AMAT 0100-00196 | VME System Mainframe CPU Controller Board
  • AMAT 0100-00169 | VME 12-Channel Stepper Motor Controller Board
  • AMAT 0100-00162 | VME Dual Channel Serial Communication Board
  • AMAT 0100-00137 | VME Stepper Motor Controller Interface Board
  • AMAT 0100-00075 | VME Digital Input/Output (DI/O) Interface Board
  • AMAT 0100-00007 VME Analog Input/Output Interface Board
  • AMAT 0100-00002 | VME Slave I/O Interface PCB
  • AMAT 0090-05596 High-Voltage DC Power Cable Assembly
  • AMAT 0090-01809 | High-Performance RF Power Cable Assembly
  • AMAT 0010-29958 | CCM HART 3 Mainframe Control Assembly
  • AMAT 0010-20003 System Controller Card Cage Assembly
  • AMAT 0010-11239 PVD High-Voltage Power Interface Assembly
  • AMAT 0010-09416 RF Matching Network Assembly
  • AMAT 0010-00019 Analog Power Supply Assembly
  • AMAT AS00009-02 (31-000-00940) | Precision Semiconductor Component
  • AMAT 0010-00028 Power Supply Module
  • AMAT 0330-1586A Serial Communication PCB
  • AMAT 0190-09690 Seriplex SENSORbus SPX-MUXADIO-001
  • AMAT 0190-04397 DeviceNet I/O Interface Board
  • AMAT 0190-02506 DeviceNet I/O Interface Card
  • AMAT 0090-00475 Seriplex 210 MUXADIO
  • AMAT 410-0198-1 Multi-Output Switching Power Supply
  • AMAT 0100-20458 high-reliability Configurable Interlock Personality Board
  • AMAT VAS104350-0415 Gasline Heater Control Unit
  • AMAT VME6U1V2 VMEbus Backplane Interface Module
  • AMAT 0920-01070 high-performance RF Power Generator
  • AMAT 0090-76133A VME Single Board Computer (SBC)
  • AMAT 0190-24115 DeviceNet I/O Interface Card
  • AMAT 0190-37607 Backplane / Base Board Assembly
  • AMAT 0190-32372 Analog Input/Output (I/O) Board
  • AMAT 0190-09956 Loadlock Interface PCB Base Assembly
  • AMAT 0190-07908 four-channel DeviceNet Interface Card
  • AMAT 0190-07905 (UPS) control board
  • AMAT 0190-07502 Precision Controller / Interface Board
  • AMAT 0190-03680 I/O Backplane
  • AMAT 0190-02200 Water Leak Detection Control Board
  • AMAT 0100-76124 Digital I/O Board Assembly
  • AMAT 0100-35563 Leak Detector Configuration PCB
  • AMAT 0100-35250 Chamber Interface DPS Centura PCB
  • AMAT 0100-35124 Seriplex I/O Distribution Board
  • AMAT 0100-35058 Loadlock Interlocks PCB
  • AMAT 0100-20213 RF Match Detector PCB
  • AMAT 0100-20063 Interface PCB Assembly
  • AMAT 0100-09225 TC AMP/INTERLOCK PCB
  • AMAT 0100-09153 Gas Panel Interface PCB
  • AMAT 0100-09127 Loader Interconnect Board
  • AMAT 0100-09009 Buffer I/O PCB Card
  • AMAT 0100-02813 Signal Conditioning Board
  • AMAT 0100-01911 AC Gas Heater Control Board
  • AMAT 0100-01708 Pedestal Integration PCB
  • AMAT 0100-00658 300mm RTP Controller Distribution PCB
  • AMAT 0100-00582 Gas Panel Controller Backplane
  • AMAT 0100-00049 Analog Signal Conditioner
  • AMAT 0100-00008 Control Interface Module
  • AMAT 0090-03402 DC Power Supply / Power Module
  • AMAT 0090-01248 DC Power Supply / Power Module
  • AMAT 0090-76109 RF Matching / Capacitor Assembly
  • AMAT 0101-57106 Substrate Voltage Board
  • AMAT 0101-57014 Deflection-Amplifier PCB
  • AMAT 0101-57012 AKT Column Control PCB (COL-C 50-10)
  • AMAT AKT 0241-58482 PCB
  • AMAT 0241-58255 REV05 PCB
  • AMAT 0161-57042 AKT framework
  • AMAT 0101-57196 electronic control board
  • AMAT 0101-57178 Digital Input / Interface PCB
  • AMAT 0101-57162 electronic control board
  • AMAT 0101-57127 P-DRV (Power Driver Board)
  • AMAT 0101-57126 D-AMP 50-06 (Digital/Analog Amplifier)
  • AMAT 0101-57125 AKT COL-C Communication Board
  • AMAT 0101-57120 D-OUT 50-32 (Digital Output Board)
  • AMAT 0101-57112 D-IN 50-32 (Digital Input Board)
  • AMAT 0101-57102 electronic control board