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MOOGUser Manual M3000® Automation System MSC II (Moog Servo Controller)

From:MOOG | Author:LIAO | Time :2025-08-20 | 657 Browse: | 🔊 Click to read aloud ❚❚ | Share:

SELV (Safety Extra-Low Voltage) according to DIN EN 60950-1. Therefore

the EU low voltage directive is not relevant for the M3000® automation system because the specified voltage levels lie below the limits.

1.8 Trademarks

Moog and Moog Authentic Repair are registered trademarks of Moog Inc. Trademarks

and its subsidiaries.

M3000® is a trademark of Moog GmbH that is registered in the EU.

1.9 Software Copyrights 

The software that is installed on M3000 Software Copyrights ® products at the time of delivery is

the property of the manufacturer. At the time of delivery, every piece of installed software is covered by copyright protection. It may be reproduced only

with the approval of the manufacturer or in accordance with the license

agreements.

All product and company names mentioned in this manual might be protected trademarks or brands of the relevant manufacturer.

The absence of the symbols ® or ™ does not indicate that the name is

2 Safety Instructions

This chapter summarizes the most important safety instructions. When handling the M3000® automation system or M3000® modules the safety instructions in the other chapters of this manual must be followed as well as the

safety instructions in the product related hardware and software documentation required for the specific application.

Following the safety instructions helps to avoid accidents, faults, and

material damage!

2.1 Typographical Conventions

Safety Instructions: 

Typographical 

Conventions

The following symbols and styles are used for identifying the different types of

safety instructions:

Additional typographical conventions: 

Ö-"12.1-Typographical Conventions" on page 124

2.2 Safety Instructions

2.2.1 Safety Related Systems

Safety Instructions: Safety 

Related Systems

More on this subject: Ö-"1.3.1-Safety Related Systems" on page 2

DANGER Identifies safety instructions that are intended to warn of

an immediate and impending danger to life and limb or

major property damage. 

Failure to observe these safety instructions will lead inevitably to death, serious personal injury (disablement)

or major property damage!

WARNING Identifies safety instructions that are intended to warn of

potential danger to life and limb or the potential for major property damage. 

Failure to observe these safety instructions might lead

to death, serious personal injury (disablement) or major

property damage!

CAUTION Identifies safety instructions that are intended to warn of

slight personal injury or minor property damage.

Failure to observe these safety instructions might lead to

slight personal injury or minor property damage.

As with any electronic automation system, the failure of

certain components when using M3000® or M3000® modules might lead to an uncontrolled and/or unpredictable

operational condition. The user should take into consideration the system level effects of all types of failures

and implement corresponding safety measures

2.2.2 Environmental Conditions

Safety Instructions: 

Environmental Conditions

More on this subject: 

Ö-"4-Environmental Conditions" on page 27

Ö-"10.2.2-Environmental Conditions" on page 74

2.2.3 ESD

Safety Instructions: ESD

WARNING Maintain under all circumstances the required environmental conditions specified for the M3000® automation

system or M3000® modules.

This ensures fault-free, reliable, and safe operation.

WARNING The PC on which tools such as MACS development environment are installed must be suitable for the environmental conditions in which it will operate.

This ensures fault-free, reliable, and safe operation.

WARNING It is not permissible to operate the M3000® automation

system or M3000® modules in a potentially explosive

environment. 

WARNING The M3000® automation system and M3000® modules

must not come into direct contact with liquids, except

where explicitely specified. Danger of short-circuit!

If they do come into direct contact with a liquid, immediately

disconnect the power supply! Before bringing the system

back into operation, it is essential that all affected components are completely dry and have been inspected by a suitably qualified technician.

WARNING Protect the M3000® automation system, M3000® modules, and the license key from electrostatic discharges!

Electrostatic discharges might damage the device's internal

components or delete the device's internal memory.

2.2.4 Project Planning and Installation

Safety Instructions: 

Project Planning and 

Installation

WARNING The vent holes of M3000® modules facilitate convection

cooling and must never be covered!

Covered vent holes might result in overheating and fire. 

WARNING No work of any kind, such as mounting, removing, wiring, or repairs to the M3000® automation system or

M3000® modules may be performed while the automation system or the modules are in operation! 

There is a danger of:

• Uncontrolled movements

• Permanent damage

• Malfunctions

Before performing any work on the M3000® automation system or M3000® modules, it is essential that the system is

stopped and the power supply is disconnected.

Therefore, all power supplies must be switched off, including

  • Applied Materials (AMAT) 0190-04098 | 5.X Factory Interface I/O Distribution Board
  • Applied Materials (AMAT) 0190-03705 | MF Producer SE/E Interlock Module
  • Applied Materials (AMAT) 0190-02748 | Flex Scanner Transition Module
  • Applied Materials (AMAT) 0190-02362 | Mainframe Interlock 1 Relay Module
  • Applied Materials (AMAT) 0190-01227 | Intelligent Motor Control OMS Board
  • Applied Materials (AMAT) 0190-00318 | VME 486 Video Controller
  • Applied Materials (AMAT) 0130-14007 | Advanced RF Signal Assembly
  • Applied Materials (AMAT) 0130-14005 | RF Cable/Interface Assembly
  • Applied Materials (AMAT) 0130-01218 | High-Efficiency RF Interface Controller
  • Applied Materials (AMAT) 0110-77040 | Head Pneumatic Controller
  • Applied Materials (AMAT) 0110-00077 | Precision Control Module
  • AMAT 0101-57015 high-performance Next-Generation Deflection Amplifier Board
  • AMAT 0100-77040 critical Head Pneumatic Controller Board
  • AMAT 0100-76291 Data Buffer / Memory Expansion Interface
  • AMAT 0100-76290 Advanced I/O Interface Board
  • AMAT 0100-76269 Control Board / Interface Module
  • AMAT 0100-71462-01 high-performance Process Controller PCB
  • AMAT 0100-71171 Chamber Interlock Control PCB
  • AMAT 0100-71154 Semiconductor Circuit Board / Electronic Group Card
  • AMAT 0100-70034 PCB Assembly (PCBA) for Endpoint VGA I/O Interconnect.
  • AMAT 0100-38032 ESC (Electrostatic Chuck) Controller PCB
  • AMAT 0100-36035 DPS Source Match / Seriplex I/O Distribution PCB
  • AMAT 0100-35231 Seriplex I/O Distribution Module
  • AMAT 0100-35217 TC Amp Interlock PCB Module
  • AMAT 0100-35065 High-Precision Serial Isolator PCB
  • AMAT 0100-35054 Advanced Chamber Interface Module
  • AMAT 0100-20453 DeviceNet Digital I/O Interface Board
  • AMAT 0100-20100 High-Performance Semiconductor Component
  • AMAT 0100-20068 Precision CCD Image Control Board
  • AMAT 0100-20064 Advanced Semiconductor Control Module
  • Applied Materials (AMAT) 0100-20018 Advanced Communication Interface Module
  • Applied Materials (AMAT) 0100-20016 High-Performance Interface and Control Module
  • Applied Materials (AMAT) 0100-20003 Digital I/O (DI/DO) Interface Board
  • Applied Materials (AMAT) 0100-20001 System Electronics Interface (SEI) / PCB Assembly
  • Applied Materials (AMAT) 0100-11030 Chamber Hardware / Gas Distribution Component
  • Applied Materials (AMAT) 0100-11022 Semiconductor Board Card
  • Applied Materials (AMAT) 0100-11018 Advanced Interface Control Module
  • Applied Materials (AMAT) 0100-11001 Precision Analog Output Board
  • ​Applied Materials (AMAT) 0100-11000 High-Precision Analog Input Board
  • Applied Materials (AMAT) 0100-09237 Advanced Signal Interface Module
  • Applied Materials (AMAT) 0100-09204 Advanced Digital Interface Control Board
  • Applied Materials (AMAT) 0100-09172 High-Density Digital I/O Control Board
  • Applied Materials (AMAT) 0100-09137 High-Performance VME Control Module
  • Applied Materials (AMAT) 0100-09054 Precision Analog Input Board
  • Applied Materials (AMAT) 0100-09029 Turbo Interconnect Interface Module
  • AMAT 0100-03391 Precision Semiconductor Control
  • AMAT 0100-01984 | VME System Interface & Logic Controller Board
  • AMAT 0100-01363 | VME Intelligent System Control & I/O Board
  • AMAT 0100-01321 | VME DeviceNet Scanner / Interface Board
  • AMAT 0100-00793 | VME Multi-Channel Interface & Logic Board
  • AMAT 0100-00689 | VME PCB Power Module
  • AMAT 0100-00580 | VME Intelligent System Controller Board
  • AMAT 0100-00523 | VME Multi-Channel Analog-to-Digital (A/D) Board
  • AMAT 0100-00493 | VME Multi-Function System Controller Board
  • AMAT 0100-00398 | VME Interface System Control Board
  • AMAT 0100-00369 | VME 12-Channel High-Speed Stepper Motor Controller
  • ​AMAT 0100-00196 | VME System Mainframe CPU Controller Board
  • AMAT 0100-00169 | VME 12-Channel Stepper Motor Controller Board
  • AMAT 0100-00162 | VME Dual Channel Serial Communication Board
  • AMAT 0100-00137 | VME Stepper Motor Controller Interface Board
  • AMAT 0100-00075 | VME Digital Input/Output (DI/O) Interface Board
  • AMAT 0100-00007 VME Analog Input/Output Interface Board
  • AMAT 0100-00002 | VME Slave I/O Interface PCB
  • AMAT 0090-05596 High-Voltage DC Power Cable Assembly
  • AMAT 0090-01809 | High-Performance RF Power Cable Assembly
  • AMAT 0010-29958 | CCM HART 3 Mainframe Control Assembly
  • AMAT 0010-20003 System Controller Card Cage Assembly
  • AMAT 0010-11239 PVD High-Voltage Power Interface Assembly
  • AMAT 0010-09416 RF Matching Network Assembly
  • AMAT 0010-00019 Analog Power Supply Assembly
  • AMAT AS00009-02 (31-000-00940) | Precision Semiconductor Component
  • AMAT 0010-00028 Power Supply Module
  • AMAT 0330-1586A Serial Communication PCB
  • AMAT 0190-09690 Seriplex SENSORbus SPX-MUXADIO-001
  • AMAT 0190-04397 DeviceNet I/O Interface Board
  • AMAT 0190-02506 DeviceNet I/O Interface Card
  • AMAT 0090-00475 Seriplex 210 MUXADIO
  • AMAT 410-0198-1 Multi-Output Switching Power Supply
  • AMAT 0100-20458 high-reliability Configurable Interlock Personality Board
  • AMAT VAS104350-0415 Gasline Heater Control Unit
  • AMAT VME6U1V2 VMEbus Backplane Interface Module
  • AMAT 0920-01070 high-performance RF Power Generator
  • AMAT 0090-76133A VME Single Board Computer (SBC)
  • AMAT 0190-24115 DeviceNet I/O Interface Card
  • AMAT 0190-37607 Backplane / Base Board Assembly
  • AMAT 0190-32372 Analog Input/Output (I/O) Board
  • AMAT 0190-09956 Loadlock Interface PCB Base Assembly
  • AMAT 0190-07908 four-channel DeviceNet Interface Card
  • AMAT 0190-07905 (UPS) control board
  • AMAT 0190-07502 Precision Controller / Interface Board
  • AMAT 0190-03680 I/O Backplane
  • AMAT 0190-02200 Water Leak Detection Control Board
  • AMAT 0100-76124 Digital I/O Board Assembly
  • AMAT 0100-35563 Leak Detector Configuration PCB
  • AMAT 0100-35250 Chamber Interface DPS Centura PCB
  • AMAT 0100-35124 Seriplex I/O Distribution Board
  • AMAT 0100-35058 Loadlock Interlocks PCB
  • AMAT 0100-20213 RF Match Detector PCB
  • AMAT 0100-20063 Interface PCB Assembly
  • AMAT 0100-09225 TC AMP/INTERLOCK PCB
  • AMAT 0100-09153 Gas Panel Interface PCB
  • AMAT 0100-09127 Loader Interconnect Board
  • AMAT 0100-09009 Buffer I/O PCB Card
  • AMAT 0100-02813 Signal Conditioning Board
  • AMAT 0100-01911 AC Gas Heater Control Board
  • AMAT 0100-01708 Pedestal Integration PCB
  • AMAT 0100-00658 300mm RTP Controller Distribution PCB
  • AMAT 0100-00582 Gas Panel Controller Backplane
  • AMAT 0100-00049 Analog Signal Conditioner
  • AMAT 0100-00008 Control Interface Module
  • AMAT 0090-03402 DC Power Supply / Power Module
  • AMAT 0090-01248 DC Power Supply / Power Module
  • AMAT 0090-76109 RF Matching / Capacitor Assembly
  • AMAT 0101-57106 Substrate Voltage Board
  • AMAT 0101-57014 Deflection-Amplifier PCB
  • AMAT 0101-57012 AKT Column Control PCB (COL-C 50-10)
  • AMAT AKT 0241-58482 PCB
  • AMAT 0241-58255 REV05 PCB
  • AMAT 0161-57042 AKT framework
  • AMAT 0101-57196 electronic control board
  • AMAT 0101-57178 Digital Input / Interface PCB
  • AMAT 0101-57162 electronic control board
  • AMAT 0101-57127 P-DRV (Power Driver Board)
  • AMAT 0101-57126 D-AMP 50-06 (Digital/Analog Amplifier)
  • AMAT 0101-57125 AKT COL-C Communication Board
  • AMAT 0101-57120 D-OUT 50-32 (Digital Output Board)
  • AMAT 0101-57112 D-IN 50-32 (Digital Input Board)
  • AMAT 0101-57102 electronic control board