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parkerVM600 MPC4 machinery protection card

From:parker | Author:LIAO | Time :2025-08-21 | 642 Browse: | 🔊 Click to read aloud ❚❚ | Share:

KEY FEATURES AND BENEFITS

• From the Vibro-Meter® product line

• Continuously online machinery protection card

• Real-time measurement and monitoring using 

state-of-the-art DSP techniques

• 4 dynamic signal channels and 2 tachometer 

(speed) channels, all individually 

programmable

• Programmable broad-band and narrow-band 

filters

• Simultaneous amplitude and phase monitoring 

in order-tracking mode

• Programmable Alert, Danger and OK set points

• Adaptive Alert and Danger levels

• Front-panel BNC connectors for easy analysis of 

buffered “raw” sensor signals

• Front-panel LEDs indicate status and alarms

KEY BENEFITS AND FEATURES (continued)

• Integrated power supplies for sensors and 

signal conditioners such as IEPE 

accelerometers and proximity measurement 

systems

• Live insertion and removal of cards 

(hot-swappable)

• Available in “standard”, “separate circuits” 

and “safety” (SIL) versions

APPLICATIONS

• Machinery protection and/or basic 

condition monitoring

MPC4 card

The MPC4 machinery protection card is the 

central element in the VM600 series machinery 

protection system (MPS), from Meggitt’s 

Vibro-Meter® product line. This very versatile card 

is capable of measuring and monitoring up to 

four dynamic signal inputs and up to two speed 

inputs simultaneously.

The dynamic signal inputs are fully programmable 

and can accept signals representing 

acceleration, velocity and displacement 

(proximity), among others. On-board multichannel processing allows measurement of 

various physical parameters, including relative 

and absolute vibration, Smax, eccentricity, thrust 

position, absolute and differential housing 

expansion, displacement and dynamic pressure.

Digital processing includes digital filtering, 

integration or differentiation (if required), 

rectification (RMS, mean value, true peak or true 

peak-to-peak), order tracking (amplitude and 

phase) and measurement of the sensor-target 

gap.

The speed (tachometer) inputs accept signals 

from a variety of speed sensors, including systems 

based on proximity probes, magnetic pulse pickup sensors or TTL signals. Fractional tachometer 

ratios are also supported.

The configuration can be expressed in metric or 

imperial units. Alert and Danger set points are fully 

programmable, as are alarm time delay, 

hysteresis and latching. The Alert and Danger 

levels can also be adapted as a function of the 

speed or any external information. 

A digital output is available internally (on the 

corresponding IOC4T input/output card) for each 

alarm level. These alarm signals can drive four 

local relays on the IOC4T card and/or can be 

routed using the VM600 rack’s Raw bus or Open 

Collector (OC) bus to drive relays on optional 

relay cards such as the RLC16 or IRC4.

The processed dynamic (vibration) signals and 

speed signals are available at the rear of the rack 

(on the front panel of the IOC4T) as analog 

output signals. Voltage-based (0 to 10 V) and 

current-based (4 to 20 mA) signals are provided.

The MPC4 performs a self-test and diagnostic 

routine on power-up. In addition, the card’s builtin “OK system” continuously monitors the level of 

signals provided by a measurement chain (sensor 

and/or signal conditioner) and indicates any 

problem due to a broken transmission line, faulty 

sensor or signal conditioner.

An LED indicator on the MPC4 front panel 

indicates whether a processing or hardware error 

has occurred. Six additional LEDs (one per input 

channel) indicate whether the OK System has 

detected a fault and whether an alarm has 

occurred on the channel.

The MPC4 card is available in three versions: a 

“standard” version, a “separate circuits” version 

and a “safety” (SIL) version, all of which function 

as a card pair using a corresponding IOC4T input/

output card.

Different versions of the MPC4 card

The MPC4 card is available in different versions, 

including “standard”, “separate circuits” and 

“safety” (SIL) versions. In addition, some versions 

are available with a conformal coating applied 

to the circuitry of the card for additional 

environmental protection against chemicals, 

dust, moisture and temperature extremes.

Both the ‘standard’ version and the “safety” (SIL) 

versions of the MPC4 card are certified to 

IEC 61508 and ISO 13849, for use in functional 

safety contexts, such as SIL 1 in accordance with 

IEC 61508 and PL c in accordance with 

ISO 13849-1.

The “standard” MPC4 card is the original version 

and supports all features and processing modes. 

The “standard” MPC4 is intended for safety 

systems using a VM600 rack with a limited range 

of cards, that is, “standard” MPC4/IOC4T card 

pairs and RLC16 relay cards. It has a VMEcompatible slave interface so it is software 

configurable via VME when there is a CPUx card 

acting as a rack controller in the VM600 rack. It is 

also software configurable via RS-232 (on the front 

panel of the card).

DESCRIPTION (continued)

The “safety” (SIL) MPC4 card, known as the 

MPC4SIL, was developed to permit a wider range 

of installation options. Specifically, VM600 racks 

that also contain condition monitoring cards such 

as the XMx16 and relay cards such as the IRC4. To 

safety certify these configurations, it was 

necessary to ensure that the MPC4SIL is isolated 

from the other cards in a VM600 rack, so that 

there is no possibility of its configuration being 

inadvertently modified.

Therefore, the MPC4SIL card does not include a 

VME-compatible slave interface, does not 

support the tachometer (speed) channels and 

does not provide all of the signal processing 

capabilities of the “standard” MPC4 card 

(see Additional specifications – for “standard” 

and “separate circuits” MPC4 cards only on 

page 9).

Segregation of MPS and CMS

The VM600 rack, machinery protection cards, 

condition monitoring cards and associated 

software are designed for compliance with the 

machinery protection system (MPS) and condition 

monitoring system (CMS) segregation 

requirements of the API 670 standard, which 

ensures that the functionality of the MPS does not 

depend on and is not compromised in any way 

by the operation of the CMS.

So although machinery protection cards and 

condition monitoring cards can easily share 

sensor signals from measurement chains, MPC4/

IOC4T card pairs do not share any 

communication buses with XMx16/XIO16T 

condition monitoring card pairs in a VM600 rack, 

and MPC4/IOC4T card pairs are configured and 

operated using the VM600 MPSx software (while 

XMx16/XIO16T card pairs are configured and 

operated using the VibroSight® software).

Applications information

When used as a card pair with an IOC4T

input/output card, the MPC4 is highly suitable for 

machinery monitoring and protection in a wide 

range of industrial applications.

For further information on the use of MPC4/IOC4T 

card pairs in general, refer to the 

VM600 machinery protection system (MPS) 

hardware manual and the VM600 MPSx software 

manuals. For information on the use of MPC4/

IOC4T card pairs in functional safety contexts, 

refer to the refer to the VM600 functional safety 

manual.

For specific applications, contact your local 

Meggitt representative.

SPECIFICATIONS – COMMON TO ALL MPC4 CARDS

Dynamic signal inputs

Number of inputs : 4 per MPC4 card

DC range : 0 to +20 V or 0 to −20 V

AC range : ±10 V max.

Common mode voltage range : −50 to +50 V

CMRR : >60 dB at 50 Hz

Crosstalk : −72 dB

Input impedance : 200 kΩ

Current input range

• DC signals : 0 to 25 mA

• AC signals : ±8 mA max.

Analog frequency range : DC to 60 kHz (−3 dB).

Note: Applicable when dynamic signal outputs are shared using 

the Raw bus (VM600 rack). Dynamic signal outputs can be shared 

with XMx16/XIO16T card pairs but cannot be shared with other 

MPC4/IOC4T card pairs.

:

Analog AC frequency range

• Without integration : 0.1 Hz to 10 kHz

• With integration : 2.5 Hz to 10 kHz

Current measuring resistor : 324.5 Ω

Buffered dynamic signal outputs

The buffered “raw” dynamic signal outputs are available on the front-panel BNC connectors (MPC4 card) and 

the screw-terminal connectors (IOC4T card).

Output impedance : 50 Ω

Analog frequency range : DC to 10 kHz (−0.1 dB with a load >1 MΩ).

DC to 10 kHz (−0.2 dB with a load >200 kΩ).

DC to 40 kHz (−3 dB).

Note: Applicable when buffered “raw” dynamic signal outputs are 

shared using the front-panel BNC connectors (VM600 MPC4 card) 

and the screw-terminal connectors (VM600 IOC4T card).

Phase error : <5° (DC to 1 kHz).

<30° (DC to 10 kHz).

Transfer ratio

• Voltage input : 1 V/V 

• Current input : 0.3245 V/mA

Speed / phase reference inputs and outputs

See Additional specifications – for “standard” and “separate circuits” MPC4 cards only on page 9.

The “standard” and “separate circuits” versions of the MPC4 card support speed/phase reference inputs and 

buffered speed/phase reference outputs but the “safety” version of the card (MPC4SIL) does not.

Discrete signal interface (DSI) inputs

Discrete signal interface (DSI) control signal inputs are available on the associated IOC4T card.

Refer to the IOC4T input/output card data sheet for further information

Analog (DC) outputs and discrete outputs

Analog (DC) outputs and discrete outputs (relays) are available on the associated IOC4T card.

Refer to the IOC4T input/output card data sheet for further information.

Measurement chain OK check (OK system)

Number of levels : Two configurable threshold levels (upper and lower)

OK level range

• Voltage inputs : ±20 VDC

• Current inputs : 0 to 23 mA

Operating principle

• Powered sensors : Line-fault detection of conditions such as open-circuit or shortcircuit

• Unpowered sensors : Line-fault detection of conditions such as open-circuit

Processing functions

Broad-band processing

Filtering options : High-pass, low-pass or band-pass 

LP/HP ratio in pass band : 500 max.

Ripple : ±0.3 dB

Slope : 6 to 60 dB/octave (software configurable)

Attenuation outside pass band : >50 dB

Amplitude accuracy : ±1% of full-scale

Linearity error : <±1%

Equivalent input noise

(without integration)

: <200 µV RMS

Narrow-band (tracking) processing

See Additional specifications – for “standard” and “separate circuits” MPC4 cards only on page 9.

The “standard” and “separate circuits” versions of the MPC4 card support narrow-band tracking but the 

“safety” version of the card (MPC4SIL) does not.

Relative shaft vibration processing

Frequency range

• Vibration : 0.1 Hz to 10 kHz

• Gap/position : DC to 1 Hz

Amplitude accuracy

• Vibration : ±1% of full-scale

• Gap/position : ±1% of full-scale

• Linearity error : <±1%

Initial gap/offset compensation : Available

SPECIFICATIONS – COMMON TO ALL MPC4 CARDS (continued

Alarm processing and combination

Level detectors

• Vibration systems : Over-level switching (A+, D+) and under-level switching (A−, D−)

• Accelerometer systems : Over-level switching (A+, D+)

• Speed channel : 2 Alert levels (A−, A+)

Alarm scanning interval : 100 ms max.

Alarm level value : User-programmable within range

Hysteresis

Latching

: User-programmable within range

: User-programmable within range

Alarm delay time : User-programmable within range

Alarm outputs : Individual alarms and common alarms (open-collector transistor)

Adaptive monitoring : Adaptive monitoring uses a control parameter (such as speed) to 

multiply the configured alarm limits by multiple coefficients 

configured for different ranges of the control parameter.

Trip multiplier uses the DSI TM control signal to multiply the 

configured alarm limits by a single configurable coefficient.

Adaptation criteria

(for adaptive monitoring)

: Speed or digital input

Logical combinations : AND, OR and majority voting logic

Number of logical combinations : 8 basic functions and 4 advanced functions

Environmental

Temperature

• Operating : −25 to 65°C (−13 to 149°F)

• Storage : −40 to 85°C (−40 to 185°F)

Humidity

• Operating : 0 to 90% non-condensing

• Storage : 0 to 95% non-condensing

Approvals

Conformity

(“standard” and “safety” versions)

: CE marking, European Union (EU) declaration of conformity.

EAC marking, Eurasian Customs Union (EACU) certificate /

declaration of conformity.

Electromagnetic compatibility : IEC/EN 61000-6-2 and IEC/EN 61000-6-4.

TR CU 020/2011.

Electrical safety : IEC/EN 61010-1.

TR CU 004/2011.

Vibration : IEC 60255-21-1 (Class 2)

Insulation coordination for measuring 

relays and protection equipment

: Separate circuits according to IEC 60255-5

for the “separate circuits” version of the MPC4

Safety integrity level : SIL 1 according to IEC 61508

for the “safety” version of the MPC4

Environmental management : RoHS compliant

Russian federal agency for technical 

regulation and metrology (Rosstandart)

: Pattern approval certificate CH.C.28.004.A N° 60224

SPECIFICATIONS – COMMON TO ALL MPC4 CARDS (continued)

Communications

VME bus : A24/D16 slave mode

RS-232 port : Configuration and communications port, proprietary protocol 

(see Connectors on page 8)

MPC4 to IOC4T bus : Similar to industry pack (IP)

Note: The VME bus provides access to the MPC4/IOC4T card pair via a CPUx card, in order to support Ethernet 

and/or fieldbus communications. The RS-232 port (front-panel serial interface) provides access to the MPC4/

IOC4T card pair for standalone operation, that is, when a CPUx card is not installed in the VM600 rack. An 

MPC4/IOC4T card pair is software configurable via VME or RS-232 (see Configuration on page 7).

Note: The “standard” and “separate circuits” versions of the MPC4 card include a VME bus but the “safety” 

version of the card (MPC4SIL) does not. Therefore, the “standard” and “separate circuits” versions of the MPC4 

card are software configurable via RS-232 or VME but the MPC4SIL card is software configurable via RS-232 

only.

Configuration

MPC4/IOC4T card pair : Software configurable via an RS-232 or Ethernet connection, using 

a computer running the VM600 MPSx software.

Hardware configurable using jumpers on the MPC4/IOC4T card 

pair.

Note: Configuration via an Ethernet connection requires a CPUx card acting as a rack controller in the VM600 

rack.

Status indicators (LEDs)

DIAG/STATUS : One multicolour (green/yellow/red) LED used to indicate the status 

of the MPC4/IOC4T card pair, such as normal operation, 

configuration status or internal hardware or firmware failures

RAW OUT 1 to 4 : Four multicolour (green/yellow/red) LED used to indicate the status 

of the individual dynamic channels

TACHO OUT 1 to 2 : Two multicolour (green/yellow) LED used to indicate the status of 

the individual tachometer (speed) channels

Power supply to card (input)

Power source : VM600 rack power supply

Supply voltages : +5 VDC and ±12 VDC

Consumption from +5 VDC supply : 12.5 W typ., plus an additional 1 W per sensor used

Consumption from ±12 VDC supply : 2.5 W max.

Power supply to sensors (output)

Voltage power supply : +27.2 V ±5% in the range 0 to 25 mA.

−27.2 V ±5% in the range 0 to 25 mA.

+15.0 V ±5% in the range 0 to 25 mA.

Current power supply : 6.16 mA ±5% in the range 1 to 23 V

Over-current protection (on-board) : 11.0 A on +5 V line

SPECIFICATIONS – COMMON TO ALL MPC4 CARDS (continued)

Connectors

RAW OUT 1 : BNC connector (female).

Buffered “raw” sensor output (analog signal) for dynamic

measurement channel 1.

RAW OUT 2 : BNC connector (female).

Buffered “raw” sensor output (analog signal) for dynamic

measurement channel 2.

RAW OUT 3 : BNC connector (female).

Buffered “raw” sensor output (analog signal) for dynamic

measurement channel 3.

RAW OUT 4 : BNC connector (female).

Buffered “raw” sensor output (analog signal) for dynamic

measurement channel 4.

TACHO OUT 1 : BNC connector (female).

Buffered “raw” sensor output (digital signal) for tachometer (speed) 

channel 1.

TACHO OUT 2 : BNC connector (female).

Buffered “raw” sensor output (digital signal) for tachometer (speed) 

channel 2.

RS232 : 9-pin D-sub connector (DCE), female.

Serial connection for communication between the MPC4/IOC4T 

card pair and a computer running the VM600 MPSx software.

Note: The RS232 connector allows a connection to a host computer 

using a standard serial cable.

Physical

Height : 6U (262 mm, 10.3 in)

Width : 20 mm (0.8 in)

Depth : 187 mm (7.4 in)

Weight : 0.40 kg (0.88 lb) approx.

ADDITIONAL SPECIFICATIONS – FOR “STANDARD” AND “SEPARATE CIRCUITS” MPC4 CARDS ONLY Speed / phase reference inputs Number of inputs : 2 per MPC4 card Triggering method : Crossing of thresholds on rising/falling edge of signal Triggering thresholds : Rising = 2/3 of peak-peak value, falling = 1/3 of peak-peak value Tachometer range : 0.016 Hz to 50 kHz on input. 0.016 Hz to 1092 Hz (1 to 65535 RPM) after division by the wheel teeth number. Speed resolution : 0.001 Hz (internal) Input voltage range : 0.4 to 500 Vpp in the range 0.3 Hz to 10 kHz. 2.0 to 500 Vpp in the range 10 kHz to 50 kHz. Minimum input voltage for reliable detection • Square-wave input signal : 0.8 Vpp (0.016 Hz to 10 kHz). 2.0 Vpp (10 kHz to 50 kHz). • Sinusoidal input signal : 10 Vpp (0.016 Hz to 1 Hz). 2.0 Vpp (1 Hz to 10 Hz). 0.8 Vpp (10 Hz to 10 kHz). 2.0 Vpp (10 kHz to 50 kHz). Range of DC component : −20 to +20 V For speed/phase reference input channels, it can be more difficult to achieve the minimum input voltage required when current is selected as the signal transmission mode. Therefore, the 200 Ω current-to-voltage conversion resistor used by the MPC4 card for current-modulated input signals should be used in any system design calculations in order to help ensure reliable detection. Buffered speed / phase reference outputs The buffered “raw” speed/phase reference outputs are available on the front-panel BNC connectors (MPC4 card). BNC outputs : TTL compatible Outputs to IOC4T and Tacho bus (VM600 rack) : TTL compatible Speed resolution : 1 RPM (external) Processing functions Narrow-band (tracking) processing Constant Q filter : Q = 28 Frequency range : 0.15 Hz to 10 kHz Max. frequency ratio in selected band : fupper / flower = 25 Rate of change of speed : 450 Hz/sec. (in band 25 to 500 Hz) Order extraction : 1/3 X, 1/2 X, 1X, 2X, 3X, 4X Phase error : <±6° max. <±1° typ. (with order = 1X). Amplitude accuracy : ±1.2% Linearity error : <±1% Note: MPC4 card speed/phase reference (tachometer) channels and any associated processing, and narrowband (tracking) processing are not valid for use in safety-related system applications. That is, these MPC4 card processing modes (signal processing functions) are not included in the SIL 1 certification for the card and should not be configured and used in functional safety contexts. For further information, refer to the VM600 functional safety manual.

ORDERING INFORMATION

To order 

please 

specify

Type Designation Ordering number (PNR)

MPC4 Different versions of the VM600 machinery protection card:

– Standard 200-510-SSS-1Hh

– Separate circuits 200-510-SSS-2Hh

– SIL safety (MPC4SIL) 200-510-SSS-3Hh

Notes

Versions of the MPC4 card are available with a conformal coating (“varnish”) applied to the circuitry of the card for additional 

environmental protection against chemicals, dust, moisture and temperature extremes.

In 2017, the MPC4 / IOC4T machinery protection card pairs were improved to (1) be RoHS compliant and (2) provide a reduced 

buffered dynamic signal output impedance, which required a redesign of the underlying buffered “raw” dynamic signal output 

circuitry. Accordingly, the different versions of the MPC4/IOC4T machinery protection card pairs in use are:

• Later versions of the MPC4 (PNRs 200-510-SSS-115, 200-510-SSS-214 and 200-510-SSS-313 or later) and

IOC4T (PNR 200-560-000-114 and 200-560-000-212 or later), which are RoHS compliant and have an output impedance of 50 Ω.

• Earlier versions of the IOC4T (PNRs 200-510-SSS-114, 200-510-SSS-213 and 200-510-SSS-312 or earlier) and

IOC4T (PNR 200-560-000-113 and 200-560-000-211 or earlier), which are not RoHS compliant and have an output impedance of 

2000 Ω.

“SSS” represents the firmware (embedded software) version and “Hh” the hardware version. “H” increments are for major 

modifications that can affect product interchangeability. “h” increments are for minor modifications that have no effect on 

interchangeability.

ABE04x VM600 system racks : Refer to corresponding data sheet

ABE056 VM600 slimline rack : Refer to corresponding data sheet

AMC8 and IOC8T VM600 analog monitoring card pair : Refer to corresponding data sheet

CPUM and IOCN VM600 modular CPU card and

input/output card.

Note: With a front-panel display and support 

for Modbus RTU/TCP or PROFINET.

: Refer to corresponding data sheet

CPUR and IOCR VM600 rack controller and communications 

interface card pair.

Note: With rack controller redundancy and 

support for Modbus RTU/TCP.

: Refer to corresponding data sheet

CPUR2 and IOCR2 VM600 rack controller and communications 

interface card pair.

Note: With mathematical processing of 

fieldbus data and support for Modbus TCP 

and PROFIBUS.

: Refer to corresponding data sheet

IOC4T VM600 input/output card (for the MPC4) : Refer to corresponding data sheets

IRC4 VM600 intelligent relay card : Refer to corresponding data sheet

MPC4G2 and IOC4G2 VM600 machinery protection card pair : Refer to corresponding data sheet

RLC16 VM600 relay card : Refer to corresponding data sheet

RLC16G2 VM600 relay card : Refer to corresponding data sheet

XMx16 and XIO16T VM600 condition monitoring card pairs : Refer to corresponding data sheet

Meggitt (Meggitt PLC) is a leading international engineering company, headquartered in England, that designs and delivers high-performance 

components and subsystems for aerospace, defence and selected energy markets. Meggitt comprises four customer-aligned divisions: 

Airframe Systems, Engine Systems, Energy & Equipment and Services & Support.

The Energy & Equipment division includes the Energy Sensing and Controls product group that specialises in sensing and monitoring solutions for a 

broad range of energy infrastructure, and control valves for industrial gas turbines, primarily for the Power Generation, Oil & Gas and Services markets. 

Energy & Equipment is headquartered in Switzerland (Meggitt SA) and incorporates the Vibro-Meter® product line, which has over 65 years of sensor 

and systems expertise and is trusted by original equipment manufacturers (OEMs) globally.

All information in this document, such as descriptions, specifications, drawings, recommendations and other statements, is believed to be 

reliable and is stated in good faith as being approximately correct, but is not binding on Meggitt (Meggitt SA) unless expressly agreed in 

writing. Before acquiring and/or using this product, you must evaluate it and determine if it is suitable for your intended application. You 

should also check our website at www.meggittsensing.com/energy for any updates to data sheets, certificates, product drawings, user 

manuals, service bulletins and/or other instructions affecting the product.

Unless otherwise expressly agreed in writing with Meggitt SA, you assume all risks and liability associated with use of the product. Any 

recommendations and advice given without charge, whilst given in good faith, are not binding on Meggitt SA. Meggitt (Meggitt SA) takes 

no responsibility for any statements related to the product which are not contained in a current Meggitt SA publication, nor for any 

statements contained in extracts, summaries, translations or any other documents not authored and produced by Meggitt SA.

The certifications and warranties applicable to the products supplied by Meggitt SA are valid only for new products purchased directly from 

Meggitt SA or from an authorised distributor of Meggitt SA.

In this publication, a dot (.) is used as the decimal separator and thousands are separated by thin spaces. Example: 12345.67890.

Copyright© 2019 Meggitt SA. All rights reserved. The information contained in this document is subject to change without prior notice.


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  • AMAT 0100-00075 | VME Digital Input/Output (DI/O) Interface Board
  • AMAT 0100-00007 VME Analog Input/Output Interface Board
  • AMAT 0100-00002 | VME Slave I/O Interface PCB
  • AMAT 0090-05596 High-Voltage DC Power Cable Assembly
  • AMAT 0090-01809 | High-Performance RF Power Cable Assembly
  • AMAT 0010-29958 | CCM HART 3 Mainframe Control Assembly
  • AMAT 0010-20003 System Controller Card Cage Assembly
  • AMAT 0010-11239 PVD High-Voltage Power Interface Assembly
  • AMAT 0010-09416 RF Matching Network Assembly
  • AMAT 0010-00019 Analog Power Supply Assembly
  • AMAT AS00009-02 (31-000-00940) | Precision Semiconductor Component
  • AMAT 0010-00028 Power Supply Module
  • AMAT 0330-1586A Serial Communication PCB
  • AMAT 0190-09690 Seriplex SENSORbus SPX-MUXADIO-001
  • AMAT 0190-04397 DeviceNet I/O Interface Board
  • AMAT 0190-02506 DeviceNet I/O Interface Card
  • AMAT 0090-00475 Seriplex 210 MUXADIO
  • AMAT 410-0198-1 Multi-Output Switching Power Supply
  • AMAT 0100-20458 high-reliability Configurable Interlock Personality Board
  • AMAT VAS104350-0415 Gasline Heater Control Unit
  • AMAT VME6U1V2 VMEbus Backplane Interface Module
  • AMAT 0920-01070 high-performance RF Power Generator
  • AMAT 0090-76133A VME Single Board Computer (SBC)
  • AMAT 0190-24115 DeviceNet I/O Interface Card
  • AMAT 0190-37607 Backplane / Base Board Assembly
  • AMAT 0190-32372 Analog Input/Output (I/O) Board
  • AMAT 0190-09956 Loadlock Interface PCB Base Assembly
  • AMAT 0190-07908 four-channel DeviceNet Interface Card
  • AMAT 0190-07905 (UPS) control board
  • AMAT 0190-07502 Precision Controller / Interface Board
  • AMAT 0190-03680 I/O Backplane
  • AMAT 0190-02200 Water Leak Detection Control Board
  • AMAT 0100-76124 Digital I/O Board Assembly
  • AMAT 0100-35563 Leak Detector Configuration PCB
  • AMAT 0100-35250 Chamber Interface DPS Centura PCB
  • AMAT 0100-35124 Seriplex I/O Distribution Board
  • AMAT 0100-35058 Loadlock Interlocks PCB
  • AMAT 0100-20213 RF Match Detector PCB
  • AMAT 0100-20063 Interface PCB Assembly
  • AMAT 0100-09225 TC AMP/INTERLOCK PCB
  • AMAT 0100-09153 Gas Panel Interface PCB
  • AMAT 0100-09127 Loader Interconnect Board
  • AMAT 0100-09009 Buffer I/O PCB Card
  • AMAT 0100-02813 Signal Conditioning Board
  • AMAT 0100-01911 AC Gas Heater Control Board
  • AMAT 0100-01708 Pedestal Integration PCB
  • AMAT 0100-00658 300mm RTP Controller Distribution PCB
  • AMAT 0100-00582 Gas Panel Controller Backplane
  • AMAT 0100-00049 Analog Signal Conditioner
  • AMAT 0100-00008 Control Interface Module
  • AMAT 0090-03402 DC Power Supply / Power Module
  • AMAT 0090-01248 DC Power Supply / Power Module
  • AMAT 0090-76109 RF Matching / Capacitor Assembly
  • AMAT 0101-57106 Substrate Voltage Board
  • AMAT 0101-57014 Deflection-Amplifier PCB
  • AMAT 0101-57012 AKT Column Control PCB (COL-C 50-10)
  • AMAT AKT 0241-58482 PCB
  • AMAT 0241-58255 REV05 PCB
  • AMAT 0161-57042 AKT framework
  • AMAT 0101-57196 electronic control board
  • AMAT 0101-57178 Digital Input / Interface PCB
  • AMAT 0101-57162 electronic control board
  • AMAT 0101-57127 P-DRV (Power Driver Board)
  • AMAT 0101-57126 D-AMP 50-06 (Digital/Analog Amplifier)
  • AMAT 0101-57125 AKT COL-C Communication Board
  • AMAT 0101-57120 D-OUT 50-32 (Digital Output Board)
  • AMAT 0101-57112 D-IN 50-32 (Digital Input Board)
  • AMAT 0101-57102 electronic control board