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parkerVM600Mk2 machinery protection system (MPS)

From:parker | Author:LIAO | Time :2025-08-21 | 421 Browse: | 🔊 Click to read aloud ❚❚ | Share:

IMPORTANT NOTICES

All statements, technical information, and recommendations in this document which relate to the products supplied 

by Meggitt vibro-meter® (Meggitt SA) are based on information believed to be reliable, but unless otherwise 

expressly agreed in writing with Meggitt SA the accuracy or completeness of such data is not guaranteed. Before 

using this product, you must evaluate it and determine if it is suitable for your intended application. You should also 

check our website at www.meggittsensing.com/energy for any updates to data sheets, Ex certificates, product 

drawings, user manuals, service bulletins and/or other instructions affecting the product.

Unless otherwise expressly agreed in writing with Meggitt SA, you assume all risks and liability associated with use 

of the product. Meggitt SA takes no responsibility for any statements related to the product which are not contained 

in a current English language Meggitt SA publication, nor for any statements contained in extracts, summaries, 

translations or any other documents not authored and produced by Meggitt SA.

The certifications and warranties applicable to the products supplied by Meggitt SA are valid only for new products 

purchased directly from Meggitt SA or from an authorised distributor of Meggitt SA.

Meggitt SA reserves the right to alter any part of this publication without prior notice.

EXPORT CONTROL

The information contained in this document may be subject to export control regulations of the European 

Community, USA or other countries. Each recipient of this document is responsible for ensuring that the transfer or 

use of any information contained in this document complies with all relevant export control regulations. ECN N/A.

COPYRIGHT

Copyright© 2020-2022 Meggitt SA.

All rights reserved.

Published and printed by Meggitt SA in Fribourg, Switzerland.

The names of actual companies and products mentioned 

herein may be the trademarks of their respective owners.

The information contained in this document is subject to change without notice. 

This information shall not be used, duplicated or disclosed, in whole or in part, 

without the express written permission of Meggitt SA (Meggitt vibro-meter®)

PREFACE

About this manual

This manual provides summary information on the VM600Mk2 machinery protection system

(MPS) consisting of the MPC4Mk2 + IOC4Mk2 machinery protection and condition monitoring

module, RLC16Mk2 relay module, and CPUMMk2 + IOCNMk2 rack controller and

communications interface module, from Meggitt’s vibro-meter® product line.

It also offers some general information concerning the installation, configuration and general

use of the system.

About Meggitt and vibro-meter®

Meggitt PLC is a global engineering group, headquartered in the UK, specialising in the

design and manufacture of high-performance components and systems for aerospace and

energy markets.

The Meggitt facility in Fribourg, Switzerland, operates as the legal entity Meggitt SA (formerly

Vibro-Meter SA). vibro-meter® is a product line of Meggitt that applies our core sensing and

monitoring technologies to power generation, oil & gas and other industrial markets.

Meggitt SA produces a wide range of vibration, dynamic pressure, proximity, air-gap and

other sensors capable of operation in extreme environments, electronic monitoring and

protection systems, and innovative software for aerospace and land-based turbomachinery.

vibro-meter® products and solutions have been at the forefront of sensing and monitoring for

more than 65 years and help keep machinery and equipment working safely, reliably and

efficiently. This includes the VM600Mk2 machinery protection system (MPS) produced for the

Meggitt vibro-meter® product line.

To learn more about Meggitt Switzerland, our proud tradition of innovation and excellence,

and our solutions for energy markets and applications, visit the Meggitt vibro-meter® Energy

website at www.meggittsensing.com/energy

This manual SHOULD be read in conjunction with a VM600 machinery

protection system (MPS) hardware manual, which is the reference

installation manual (see Related publications and documentation).

This manual SHOULD NOT be used as a replacement for the reference

installation manual, since the installation instructions in this manual are

incomplete

Who should use this manual?

The manual is intended for use by qualified personnel, such as operators of process

monitoring/control systems using a VM600Mk2 machinery protection system (MPS).

NOTE: Personnel involved in the installation, operation and maintenance of Meggitt

vibro-meter® systems are assumed to have the necessary technical training in

electronics and/or mechanical engineering (professional certificate/diploma or

equivalent) to enable them to install, configure, use and/or maintain the system

correctly and safely.

Applicability of the manual

The manual is applicable to the VM600Mk2 machinery protection system (MPS) using

MPC4Mk2 + IOC4Mk2 machinery protection and condition monitoring modules, optional

RLC16Mk2 relay modules, and optional CPUMMk2 + IOCNMk2 rack controller and

communications interface module, that is, the evolution of the VM600 MPS based on existing

VM600 rack infrastructure (that is, the first-generation VM600 cards/systems (VM600Mk1)).

Different versions of VM600Mk2/VM600 MPS racks and modules can be visually identified

from the front panels of the rack and modules. For each module, the lower handle on the front

panel includes the module’s name.

For a VM600Mk2 MPS, the main modules are:

• MPC4Mk2 + IOC4Mk2 machinery protection and condition monitoring module

• RLC16Mk2 relay module

• CPUMMk2 + IOCNMk2 rack controller and communications interface module.

Users of a VM600Mk2 MPS should use this VM600Mk2 machinery protection system (MPS)

quick start manual and refer to a VM600 machinery protection system (MPS) hardware

manual, as required.

For reference, for a VM600 MPS, the main equivalent cards (modules) are:

• MPC4/IOC4T machinery protection card pair

• RLC16 relay card

• CPUx/IOCx (CPUM) rack controller and communications interface module.

Users of a VM600 MPS should refer to the VM600 machinery protection system (MPS)

quick start manual and refer to a VM600 machinery protection system (MPS) hardware

manual, as required.

Terminology

To distinguish between the different generations of VM600Mk2/VM600 MPS racks and

modules/cards from the Meggitt vibro-meter® product line, the following terminology is used

in this document.

Hardware

VM600Mk2 MPS, rack or system – used to refer to a VM600Mk2/VM600 rack containing one

or more of the following machinery protection system (MPS) modules: MPC4Mk2 + IOC4Mk2

machinery protection and condition monitoring module, RLC16Mk2 relay module, and

CPUMMk2 + IOCNMk2 rack controller and communications interface module, (that is, a

second-generation VM600Mk2 system).

VM600 MPS, rack or system – used to refer to a VM600 rack containing one or more of the

following machinery protection system (MPS) cards (modules): MPC4/IOC4T machinery

protection card pair, RLC16 relay card, AMC8/IOC8T analog monitoring card pair, and

CPUx/IOCx (CPUM) rack controller and communications interface module (that is,

first-generation VM600 systems (VM600Mk1)).

Software

VibroSight® is proprietary software from Meggitt vibro-meter® for the configuration, operation

and management of VM600Mk2/VM600 rack-based systems and VibroSmart® distributed

monitoring system (DMSs). 

VibroSight Protect is a separate VibroSight® software module used for the configuration and

operation of a VM600Mk2 MPS. This helps ensure complete separation (“segregation”) of

machinery protection system (MPS) and condition monitoring system (CMS) in a single

VM600Mk2/VM600 rack.

Related publications and documentation

Further information on products can be found in their corresponding data sheets, which are

available from our website at www.meggittsensing.com/energy or can be obtained from your

local Meggitt representative.

For further information on the use of a VM600Mk2 machinery protection system (MPS), refer

to the following Meggitt vibro-meter® documentation:

• VM600 machinery protection system (MPS) hardware manual – standard version

(document reference MAMPS-HW/E)

• VM600 machinery protection system (MPS) hardware manual – CSA version

(document reference MAMPS-HW/E-CSA)

• VM600Mk2 MPC4Mk2 + IOC4Mk2 machinery protection and condition monitoring module

data sheet (document reference DS 268-121).

• VM600Mk2 RLC16Mk2 relay module data sheet (document reference DS 268-125).

• VM600Mk2 CPUMMk2 + IOCNMk2 rack controller and communications interface module

data sheet (document reference DS 268-035).

• VibroSight® machinery monitoring system software data sheet

(document reference DS 660-020-005-2xxA)

Symbols and styles used in this manual

The following symbols are used in this manual where appropriate:

NOTE: This is an example of the NOTE paragraph style. This draws the operator’s

attention to complementary information or advice relating to the subject being

treated.

The WARNING safety symbol

THIS INTRODUCES DIRECTIVES, PROCEDURES OR PRECAUTIONARY MEASURES WHICH

MUST BE EXECUTED OR FOLLOWED. FAILURE TO OBEY A WARNING MIGHT RESULT IN

INJURY TO THE OPERATOR AND/OR THIRD PARTIES, AND/OR RESULT IN DAMAGE TO

EQUIPMENT.

The CAUTION safety symbol

This draws the operator's attention to information, directives or procedures

which must be executed or followed. Failure to obey a caution can result in

damage to equipment.

The ELECTROSTATIC SENSITIVE DEVICE symbol

This indicates that the device or system being handled can be damaged by

electrostatic discharges. For further information, see Handling precautions

for electrostatic sensitive devices on page xiv.

Important remarks on safety 

Every effort has been made to include specific safety-related procedures in this manual using

the symbols described above. However, operating personnel are expected to follow all

generally accepted safety procedures.

All personnel who are liable to operate the equipment described in this manual should be

trained in the correct safety procedures.

Meggitt does not accept any liability for injury or material damage caused by failure to obey

any safety-related instructions or due to any modification, transformation or repair carried out

on the equipment without written permission from Meggitt SA. Any modification,

transformation or repair carried out on the equipment without written permission from

Meggitt SA will invalidate any warranty.

Electrical safety and installation 

FAILURE TO FOLLOW THE INSTRUCTIONS AND IMPLEMENT THE RECOMMENDATIONS IN

THIS MANUAL MIGHT RESULT IN INJURY TO THE OPERATOR AND/OR THIRD PARTIES,

AND/OR RESULT IN DAMAGE TO EQUIPMENT AND WILL INVALIDATE ANY WARRANTY.

Read this manual carefully and observe the safety instructions before

installing and using the equipment described.

By doing this, you will be aware of the potential hazards and be able to work

safely, ensuring your own protection and also that of the equipment.

Important remarks on safety Every effort has been made to include specific safety-related procedures in this manual using the symbols described above. However, operating personnel are expected to follow all generally accepted safety procedures. All personnel who are liable to operate the equipment described in this manual should be trained in the correct safety procedures. Meggitt does not accept any liability for injury or material damage caused by failure to obey any safety-related instructions or due to any modification, transformation or repair carried out on the equipment without written permission from Meggitt SA. Any modification, transformation or repair carried out on the equipment without written permission from Meggitt SA will invalidate any warranty. Electrical safety and installation FAILURE TO FOLLOW THE INSTRUCTIONS AND IMPLEMENT THE RECOMMENDATIONS IN THIS MANUAL MIGHT RESULT IN INJURY TO THE OPERATOR AND/OR THIRD PARTIES, AND/OR RESULT IN DAMAGE TO EQUIPMENT AND WILL INVALIDATE ANY WARRANTY. Read this manual carefully and observe the safety instructions before installing and using the equipment described. By doing this, you will be aware of the potential hazards and be able to work safely, ensuring your own protection and also that of the equipment.

WHEN INSTALLING A VM600Mk2/VM600 RACK, OBSERVE ALL SAFETY (WARNING AND

CAUTION) STATEMENTS IN THIS MANUAL AND FOLLOW ALL NATIONAL AND LOCAL

ELECTRICAL CODES.

ONLY TRAINED AND QUALIFIED PERSONNEL (SUCH AS A QUALIFIED/LICENSED

ELECTRICIAN) SHOULD BE ALLOWED TO INSTALL OR REPLACE THIS EQUIPMENT.

CHECK NATIONAL AND LOCAL ELECTRICAL CODES, REGULATIONS AND DIRECTIVES

BEFORE WIRING.

A VM600Mk2/VM600 RACK MUST BE DIRECTLY AND PERMANENTLY CONNECTED TO

LIVE EARTH (PE), KNOWN AS AN EQUIPMENT GROUNDING CONDUCTOR IN THE US

NATIONAL ELECTRICAL CODE, USING THE EARTH CONDUCTOR OF THE EXTERNAL

MAINS POWER SUPPLY LEAD (POWER CORD), IN ORDER TO HELP PREVENT THE RISK

OF ELECTRIC SHOCK.

SELECT CABLE WIRE SIZES AND CONNECTORS (CURRENT-CARRYING CAPACITY),

INCLUDING THE EXTERNAL MAINS POWER SUPPLY LEAD (POWER CORD), TO MEET THE

REQUIREMENTS OF THE APPLICATION IN ACCORDANCE WITH THE APPLICABLE

NATIONAL AND LOCAL ELECTRICAL CODES.

CHECKS TO ENSURE ELECTRICAL SAFETY SHOULD BE CARRIED OUT BY A COMPETENT

PERSON.

DEFLECTION PLATES (BARRIERS) CAN BE INSTALLED ABOVE AND BELOW A

VM600Mk2/VM600 RACK IN ORDER TO HELP REDUCE THE RISK OF ELECTRICAL

SHOCK AND IN THE CASE OF THE BARRIER INSTALLED BELOW THE RACK, IN ORDER TO

HELP PREVENT THE SPREAD OF FIRE TOO.

FAILURE TO FOLLOW THESE INSTRUCTIONS CAN RESULT IN DEATH, SERIOUS INJURY,

AND/OR EQUIPMENT DAMAGE

Hazardous voltages and the risk of electric shock 

Hot surfaces and the risk of burning 

Heavy objects and the risk of injury

HAZARDOUS VOLTAGES EXIST WITHIN A VM600Mk2/VM600 RACK.

WHEN A MODULE/CARD, PANEL OR POWER SUPPLY IS REMOVED FROM A

VM600Mk2/VM600 RACK, THE RACK BACKPLANE – CONTAINING HAZARDOUS

VOLTAGES – IS EXPOSED AND THERE IS THE RISK OF ELECTRIC SHOCK, AS INDICATED

BY THE USE OF THE FOLLOWING WARNING LABEL ON THE EQUIPMENT:

REGARD ANY EXPOSED COMPONENT, CONNECTOR OR PRINTED CIRCUIT BOARD (PCB)

AS A POSSIBLE SHOCK HAZARD AND DO NOT TOUCH WHEN ENERGISED.

FOR SAFETY REASONS, ANY VM600Mk2/VM600 RACK SLOT (MODULE POSITION) NOT

POPULATED BY A MODULE MUST BE COVERED BY A BLANK PANEL.

FAILURE TO FOLLOW THESE INSTRUCTIONS CAN RESULT IN DEATH, SERIOUS INJURY,

AND/OR EQUIPMENT DAMAGE.

HOT SURFACES CAN EXIST WITHIN AND ON A VM600Mk2/VM600 RACK.

DEPENDING ON THE AMBIENT OPERATING TEMPERATURE AND POWER CONSUMPTION,

AND THE INSTALLATION AND COOLING OF A VM600Mk2/VM600 RACK, THE TOP OF

THE RACK CAN BECOME HOT TO TOUCH AND THERE IS THE RISK OF BURNING WHEN

HANDLING THE RACK, AS INDICATED BY THE USE OF THE FOLLOWING WARNING LABEL

ON THE EQUIPMENT:

REGARD THE TOP OF A VM600Mk2/VM600 RACK AS A HOT SURFACE AND DO NOT

TOUCH UNLESS COOL.

FAILURE TO FOLLOW THESE INSTRUCTIONS CAN RESULT IN INJURY.

A FULLY POPULATED VM600Mk2/VM600 SYSTEM RACK (ABE04X) WITH RPS6U

RACK POWER SUPPLIES AND MODULES INSTALLED IS A HEAVY OBJECT.

DEPENDING ON THE NUMBER OF RPS6U RACK POWER SUPPLIES AND MODULES

INSTALLED, A VM600Mk2/VM600 SYSTEM RACK CAN BE TOO HEAVY TO HANDLE

MANUALLY BY ONE PERSON AND THERE IS THE RISK OF INJURY DURING INSTALLATION

OR REMOVAL. ACCORDINGLY, A FULLY POPULATED VM600Mk2/VM600 SYSTEM

RACK SHOULD BE CONSIDERED AS A HEAVY OBJECT THAT REQUIRES TWO PEOPLE TO

LIFT, LOWER OR OTHERWISE HANDLE MANUALLY.

ALTERNATIVELY, THE RPS6U RACK POWER SUPPLIES (THE HEAVIEST SYSTEM

COMPONENTS AND EASILY REMOVABLE), AND THEN THE MODULES AS NECESSARY,

CAN BE REMOVED FROM THE RACK IN ORDER TO REDUCE THE WEIGHT AND ALLOW

ONE PERSON TO SAFELY HANDLE MANUALLY.

FAILURE TO FOLLOW THESE INSTRUCTIONS CAN RESULT IN INJURY

Handling precautions for electrostatic sensitive devices

Certain devices used in electronic equipment can be damaged by electrostatic discharges

resulting from built-up static electricity. Because of this, special precautions must be taken to

minimise or eliminate the possibility of these electrostatic discharges occurring.

• Before handling VM600Mk2 modules (cards) and other electronic circuits, discharge the

static electricity from your body by touching and momentarily holding a grounded metal

object (such as a pipe or cabinet).

• Avoid the build-up of static electricity on your body by not wearing synthetic clothing

material, as these tend to generate and store static electric charges. Cotton or cotton

blend materials are preferred because they do not store static electric charges.

• Do not handle VM600Mk2 modules (cards) and other electronic circuits unless it is

absolutely necessary. Only hold modules/cards by their handles or panels.

• Do not touch printed circuit boards, their connectors or their components with conductive

devices or with your hands.

• Put the any module (card), printed circuit board or other electronic circuit containing

electronic components into an antistatic protective bag immediately after removing it

from a VM600Mk2/VM600 rack.

Replacement parts and accessories 

For information on replacement parts and accessories:

• Visit the Meggitt vibro-meter® Energy website at www.meggittsensing.com/energy

• Contact your local Meggitt representative.

Read the following recommendations carefully before handling electronic

circuits, printed circuit boards or modules containing electronic

components

Use only approved replacement parts and accessories.

Do not connect with incompatible products or accessories.

Only use replacement parts and accessories intended for use with

VM600Mk2/VM600 racks that have been approved by Meggitt SA.

Using incompatible replacement parts and accessories could be

dangerous and may damage the equipment or result in injury.


  • Applied Materials (AMAT) 0190-04098 | 5.X Factory Interface I/O Distribution Board
  • Applied Materials (AMAT) 0190-03705 | MF Producer SE/E Interlock Module
  • Applied Materials (AMAT) 0190-02748 | Flex Scanner Transition Module
  • Applied Materials (AMAT) 0190-02362 | Mainframe Interlock 1 Relay Module
  • Applied Materials (AMAT) 0190-01227 | Intelligent Motor Control OMS Board
  • Applied Materials (AMAT) 0190-00318 | VME 486 Video Controller
  • Applied Materials (AMAT) 0130-14007 | Advanced RF Signal Assembly
  • Applied Materials (AMAT) 0130-14005 | RF Cable/Interface Assembly
  • Applied Materials (AMAT) 0130-01218 | High-Efficiency RF Interface Controller
  • Applied Materials (AMAT) 0110-77040 | Head Pneumatic Controller
  • Applied Materials (AMAT) 0110-00077 | Precision Control Module
  • AMAT 0101-57015 high-performance Next-Generation Deflection Amplifier Board
  • AMAT 0100-77040 critical Head Pneumatic Controller Board
  • AMAT 0100-76291 Data Buffer / Memory Expansion Interface
  • AMAT 0100-76290 Advanced I/O Interface Board
  • AMAT 0100-76269 Control Board / Interface Module
  • AMAT 0100-71462-01 high-performance Process Controller PCB
  • AMAT 0100-71171 Chamber Interlock Control PCB
  • AMAT 0100-71154 Semiconductor Circuit Board / Electronic Group Card
  • AMAT 0100-70034 PCB Assembly (PCBA) for Endpoint VGA I/O Interconnect.
  • AMAT 0100-38032 ESC (Electrostatic Chuck) Controller PCB
  • AMAT 0100-36035 DPS Source Match / Seriplex I/O Distribution PCB
  • AMAT 0100-35231 Seriplex I/O Distribution Module
  • AMAT 0100-35217 TC Amp Interlock PCB Module
  • AMAT 0100-35065 High-Precision Serial Isolator PCB
  • AMAT 0100-35054 Advanced Chamber Interface Module
  • AMAT 0100-20453 DeviceNet Digital I/O Interface Board
  • AMAT 0100-20100 High-Performance Semiconductor Component
  • AMAT 0100-20068 Precision CCD Image Control Board
  • AMAT 0100-20064 Advanced Semiconductor Control Module
  • Applied Materials (AMAT) 0100-20018 Advanced Communication Interface Module
  • Applied Materials (AMAT) 0100-20016 High-Performance Interface and Control Module
  • Applied Materials (AMAT) 0100-20003 Digital I/O (DI/DO) Interface Board
  • Applied Materials (AMAT) 0100-20001 System Electronics Interface (SEI) / PCB Assembly
  • Applied Materials (AMAT) 0100-11030 Chamber Hardware / Gas Distribution Component
  • Applied Materials (AMAT) 0100-11022 Semiconductor Board Card
  • Applied Materials (AMAT) 0100-11018 Advanced Interface Control Module
  • Applied Materials (AMAT) 0100-11001 Precision Analog Output Board
  • ​Applied Materials (AMAT) 0100-11000 High-Precision Analog Input Board
  • Applied Materials (AMAT) 0100-09237 Advanced Signal Interface Module
  • Applied Materials (AMAT) 0100-09204 Advanced Digital Interface Control Board
  • Applied Materials (AMAT) 0100-09172 High-Density Digital I/O Control Board
  • Applied Materials (AMAT) 0100-09137 High-Performance VME Control Module
  • Applied Materials (AMAT) 0100-09054 Precision Analog Input Board
  • Applied Materials (AMAT) 0100-09029 Turbo Interconnect Interface Module
  • AMAT 0100-03391 Precision Semiconductor Control
  • AMAT 0100-01984 | VME System Interface & Logic Controller Board
  • AMAT 0100-01363 | VME Intelligent System Control & I/O Board
  • AMAT 0100-01321 | VME DeviceNet Scanner / Interface Board
  • AMAT 0100-00793 | VME Multi-Channel Interface & Logic Board
  • AMAT 0100-00689 | VME PCB Power Module
  • AMAT 0100-00580 | VME Intelligent System Controller Board
  • AMAT 0100-00523 | VME Multi-Channel Analog-to-Digital (A/D) Board
  • AMAT 0100-00493 | VME Multi-Function System Controller Board
  • AMAT 0100-00398 | VME Interface System Control Board
  • AMAT 0100-00369 | VME 12-Channel High-Speed Stepper Motor Controller
  • ​AMAT 0100-00196 | VME System Mainframe CPU Controller Board
  • AMAT 0100-00169 | VME 12-Channel Stepper Motor Controller Board
  • AMAT 0100-00162 | VME Dual Channel Serial Communication Board
  • AMAT 0100-00137 | VME Stepper Motor Controller Interface Board
  • AMAT 0100-00075 | VME Digital Input/Output (DI/O) Interface Board
  • AMAT 0100-00007 VME Analog Input/Output Interface Board
  • AMAT 0100-00002 | VME Slave I/O Interface PCB
  • AMAT 0090-05596 High-Voltage DC Power Cable Assembly
  • AMAT 0090-01809 | High-Performance RF Power Cable Assembly
  • AMAT 0010-29958 | CCM HART 3 Mainframe Control Assembly
  • AMAT 0010-20003 System Controller Card Cage Assembly
  • AMAT 0010-11239 PVD High-Voltage Power Interface Assembly
  • AMAT 0010-09416 RF Matching Network Assembly
  • AMAT 0010-00019 Analog Power Supply Assembly
  • AMAT AS00009-02 (31-000-00940) | Precision Semiconductor Component
  • AMAT 0010-00028 Power Supply Module
  • AMAT 0330-1586A Serial Communication PCB
  • AMAT 0190-09690 Seriplex SENSORbus SPX-MUXADIO-001
  • AMAT 0190-04397 DeviceNet I/O Interface Board
  • AMAT 0190-02506 DeviceNet I/O Interface Card
  • AMAT 0090-00475 Seriplex 210 MUXADIO
  • AMAT 410-0198-1 Multi-Output Switching Power Supply
  • AMAT 0100-20458 high-reliability Configurable Interlock Personality Board
  • AMAT VAS104350-0415 Gasline Heater Control Unit
  • AMAT VME6U1V2 VMEbus Backplane Interface Module
  • AMAT 0920-01070 high-performance RF Power Generator
  • AMAT 0090-76133A VME Single Board Computer (SBC)
  • AMAT 0190-24115 DeviceNet I/O Interface Card
  • AMAT 0190-37607 Backplane / Base Board Assembly
  • AMAT 0190-32372 Analog Input/Output (I/O) Board
  • AMAT 0190-09956 Loadlock Interface PCB Base Assembly
  • AMAT 0190-07908 four-channel DeviceNet Interface Card
  • AMAT 0190-07905 (UPS) control board
  • AMAT 0190-07502 Precision Controller / Interface Board
  • AMAT 0190-03680 I/O Backplane
  • AMAT 0190-02200 Water Leak Detection Control Board
  • AMAT 0100-76124 Digital I/O Board Assembly
  • AMAT 0100-35563 Leak Detector Configuration PCB
  • AMAT 0100-35250 Chamber Interface DPS Centura PCB
  • AMAT 0100-35124 Seriplex I/O Distribution Board
  • AMAT 0100-35058 Loadlock Interlocks PCB
  • AMAT 0100-20213 RF Match Detector PCB
  • AMAT 0100-20063 Interface PCB Assembly
  • AMAT 0100-09225 TC AMP/INTERLOCK PCB
  • AMAT 0100-09153 Gas Panel Interface PCB
  • AMAT 0100-09127 Loader Interconnect Board
  • AMAT 0100-09009 Buffer I/O PCB Card
  • AMAT 0100-02813 Signal Conditioning Board
  • AMAT 0100-01911 AC Gas Heater Control Board
  • AMAT 0100-01708 Pedestal Integration PCB
  • AMAT 0100-00658 300mm RTP Controller Distribution PCB
  • AMAT 0100-00582 Gas Panel Controller Backplane
  • AMAT 0100-00049 Analog Signal Conditioner
  • AMAT 0100-00008 Control Interface Module
  • AMAT 0090-03402 DC Power Supply / Power Module
  • AMAT 0090-01248 DC Power Supply / Power Module
  • AMAT 0090-76109 RF Matching / Capacitor Assembly
  • AMAT 0101-57106 Substrate Voltage Board
  • AMAT 0101-57014 Deflection-Amplifier PCB
  • AMAT 0101-57012 AKT Column Control PCB (COL-C 50-10)
  • AMAT AKT 0241-58482 PCB
  • AMAT 0241-58255 REV05 PCB
  • AMAT 0161-57042 AKT framework
  • AMAT 0101-57196 electronic control board
  • AMAT 0101-57178 Digital Input / Interface PCB
  • AMAT 0101-57162 electronic control board
  • AMAT 0101-57127 P-DRV (Power Driver Board)
  • AMAT 0101-57126 D-AMP 50-06 (Digital/Analog Amplifier)
  • AMAT 0101-57125 AKT COL-C Communication Board
  • AMAT 0101-57120 D-OUT 50-32 (Digital Output Board)
  • AMAT 0101-57112 D-IN 50-32 (Digital Input Board)
  • AMAT 0101-57102 electronic control board