ABSOLUTE™
Temperature Control System
DESCRIPTION
The ABSOLUTETM Temperature Control System provides accurate and stable
temperature control of liquid source chemicals. Five different models provide
temperature control through the range of 10°- 90°C, with an accuracy of ± 0.2°C.
FEATURES AND BENEFITS
• Modular design for easy installation
• Microprocessor-based control circuitry for accurate and stable temperature control
• Electronic and visual (sight glass) level sense (for monitoring chemical levels)
• Removable source cup permits safe container installation from the front of the unit
• Full range of safety interlocks
• DDC interface for remote control and monitoring
• Holds 1500cc quartz or 1.2 liter stainless steel containers
• Stainless steel versions incorporate level sense and integrated lid heater
• Trans-LC® version eliminates all spark sources and reduces over temperature cutout
interlock
ATCS with 1500cc patented
breakseal quartz bubbler.
APPLICATIONS
• Temperature control for CVD source chemicals
(i.e. TEOS, ZTOMCATS®, LTO-410™,
TMB,TMPI)
• Temperature control for diffusion and oxide
passivation source chemicals (i.e. Trans-LC,
TCA, POCl3, and PBr3 and BBr3)
RELATED PRODUCTS
Delivery Containers
• 1500cc Quartz Breakseal Containers
• 1.2 liter Stainless Steel Containers
Delivery Equipment
• Serves as temperature controller for the V
MDOT™ Delivery System
Refill Equipment
• Transfill“ II Automated Chemical Refill System
• UltraFillTM Automated Chemical Refill System
ABSOLUTE™
* Minimum cooling capability is 15°C below ambient temperature.
** Add a minimum of 78mm (3in) to depth measurements for cable connection clearance.
*** Overall height = 62.5mm (2.5in) + source height.
**** Not including weight of source and chemical.
ABSOLUTE SYSTEM SPECIFICATIONS
PERFORMANCE
Temperature Control:
Standard Temperature Model: 10°C* to 60°C
High Temperature Model: 40°C to 90°C
Trans-LC Model: 10°C to 22°C
Temp Accuracy: ± 0.2°C of setpoint
Temp Stability: ± 0.1°C
Readout Resolution: 0.1
Temp Cutout (std): 70°C
Temp Cutout (Trans-LC): 50°C
Temp Cutout (high temp): 110°C
LIQUID LEVEL SENSE
Quartz Breakseal Container:
Discrete level sensors at 100%, 50%, 25% and 15%.
Backlit sight glass for visual inspection of liquid level.
Stainless Steel Container:
Discrete level sensors for indications at 100%, 75% and 15%.
ALARMS
Liquid Level Alarm:
Alarm activated when liquid level reaches 15% full.
Temperature Alarm:
Alarm is activated when the sensed temperature is not within ± 2°C of the temperature setpoint.
(± 5°C for Trans-LC unit)
Alarm Indicators:
All alarm conditions generate an audio alarm, flashing LED display with alarm condition, and an alarm output through
the DDC interface. (The audio alarm can be silenced for 30 minute intervals.)
DIMENSIONS
ABSOLUTE Electronics Module:
Height: 233.7mm (9.20 in)
Width: 63.5mm (2.50 in)
Depth**: 260.4mm (10.25 in)
ABSOLUTE Base Unit
Height: 233.7mm (9.20 in)
Width: 209.6mm (8.25 in)
Depth**: 262.9mm (10.35 in)
Source elevation***: 62.5mm (2.5 in)
WEIGHT
ABSOLUTE Base Unit: 6.7kg**** (14.9 lbs)
ABSOLUTE Electronics Module: 4.8kg (10.5 lbs)
MOUNTING
• ABSOLUTE must be mounted on a level, low vibration surface.
• ABSOLUTE base unit should be secured to mounting surface to prevent it from sliding when removing and
installing the source cup.
• ABSOLUTE electronics module can be remoted up to 4.84 meters (16 feet) away from the base unit.
POWER REQUIREMENTS
• 90 - 154VAC 50/60 Hz 275VA max
• 180 - 264VAC 50/60 Hz 275VA max
DDC INPUTS
• Analog Temperature Setpoint
DDC OUTPUTS
• Analog Temperature Output
• Analog Level Output
• Temperature Alarm
• Liquid Level Alarm
• Any Alarm
CABLE LENGTH
• DDC Cable 20 Conductor Shielded: 6.10 meters (20ft) 20-conductor shielded
• ABSOLUTE Interconnect Cable: 456.85mm (18in) standard
– Cable lengths up to 6.10 meters (20ft) are available upon request.
SOURCE CONTAINERS
The ABSOLUTE is fully compatible with Schumacher 1500cc quartz and 1.2 liter stainless steel containers.
1.2 Liter stainless steel container:*
Standard Configuration (BK1200SS Series)
• Manual inlet/outlet valves
• VCR inlet/outlet connectors
• Level Sense Probe
Integral Lid Heater Configuration (BK1200SSV)
• Pneumatic outlet valve
• 1/2" male VCR outlet connector
• Level sense probe
TransFill Host Container (BK1200SSR)
• Designed for automatic refill
• Pneumatic valves, VCR connectors
• Continuous and discrete level sense probes included
1500cc Quartz Containers:
D-Series Quartz Container (BK3D1)
• Teflon inlet/outlet valves
• 1/4" inlet and 3/8" outlet connectors (for teflon tubing)
R-Series Quartz Container (BK3R1)
• Designed for Automatic Refill
• Pneumatic Teflon Control Valves