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parkerFunctional Safety Manual VM600 Machinery Protection Safety Integrated System

From:parker | Author:LIAO | Time :2025-08-21 | 506 Browse: | 🔊 Click to read aloud ❚❚ | Share:

PREFACE

About This Manual

This manual provides reference information on using Vibro-Meter’s VM600 Series systems in functional

safety contexts. It is applicable to the following VM600 systems:

• Machinery Protection System (MPS).

Who Should Use This Manual?

The manual is written for the designers and operators of process monitoring and process control systems

using Vibro-Meter’s VM600 Series systems.

The system designers and operators are assumed to have the necessary technical training in safety

engineering, electronics and mechanical engineering (professional certificate/diploma or equivalent) to

enable them to install, program and use the system(s).

Structure of the Manual

This section gives an overview of the structure of the document and the information contained within it.

Some information has been deliberately repeated in different sections of the document to minimize

cross-referencing and to facilitate understanding through reiteration.

The chapters are presented in a logical order. You should read those that are most relevant to you and

then keep the document at hand for future reference.

The structure of the document is as follows:

Chapter 1 Introduction

Explains the purpose and scope of this document.

Chapter 2 Certification

Highlights the VM600 system certification achieved.

Chapter 3 Safety Issues

Provides information on the safety issues related to the use of a VM600

system in a functional safety context.

Chapter 4 Disposal

Provides advice on how to dispose of your electrical and electronic

equipment at the end of its life.

Chapter 5 Customer Support

Provides contact details for technical queries and for getting equipment

repaired. Includes a customer feedback form allowing the user to provide us

with valuable feedback on our documentation.

Symbols and Styles Used in This Manual

The following symbols are used in this manual where appropriate:

NOTE : This is an example of the NOTE paragraph style. This draws the operator’s

attention to additional information or advice relating to the subject.

Important Remarks on Safety

Additional Remarks

Every effort has been made to include specific safety-related procedures in this manual using

the symbols described above. However, operating personnel are expected to follow all

generally accepted safety procedures.

Safety procedures should be communicated to all personnel who are liable to operate the

equipment described in this manual.

Vibro-Meter does not accept any liability for injury or material damage caused by failure to

obey any safety-related instructions or due to any modification, transformation or repair

carried out on the equipment without written permission from Vibro-Meter. Any modification,

transformation or repair carried out on the equipment without written permission from

Vibro-Meter will invalidate any warranty.

The WARNING safety symbol

THIS INTRODUCES DIRECTIVES, PROCEDURES OR PRECAUTIONARY MEASURES WHICH

MUST BE EXECUTED OR FOLLOWED. FAILURE TO OBEY A WARNING CAN RESULT IN

INJURY TO THE OPERATOR OR THIRD PARTIES.

The CAUTION safety symbol

This draws the operator's attention to information, directives or procedures

which must be executed or followed. Failure to obey a caution can result in

damage to equipment.

 INTRODUCTION

1.1 Purpose

The purpose of this document is to describe the use of a VM600 machinery protection system

(MPS) in a functional safety context as defined by IEC 61508 and ISO 13849-1.

1.2 Scope

The document applies to VM600 series machinery protection systems as outlined below in

Figure 1-1 and Table 1-1

Part Description Mandatory Comment

ABE04x Rack Yes 19” rack

RPS6U Power supply Yes Two PSUs should be used.

The PSUs can be AC or DC.

MPC4 Machinery protection 

card (4+2 channels) Yes 1 to n cards

IOC4T Input/output card Yes 1 per MPC4 card

RLC16 Relay expansion card No

MPS1 Software Yes

Warning

The following symbol introduces directives, procedures or precautionary measures which

must be executed or followed.

FAILURE TO OBEY A WARNING MIGHT RESULT IN INJURY TO THE OPERATOR OR THIRD PARTIES AND

DAMAGE TO EQUIPMENT.

1.4 Reference Part Numbers

Part Number Card / Product Name

204-040-100-012 Standard 19” rack

204-040-100-112 Standard 19” rack insulated version

204-040-100-211 Standard 19” rack CSA standard

204-042-100-012 Standard 19” rack Siemens standard

204-042-100-211 Standard 19” rack Siemens CSA standard

200-510-071-113 MPC4

200-560-000-113 IOC4T

200-570-000-111 RLC16

200-582-200-013 RPS6U 24VDC

200-582-300-013 RPS6U 48VDC

200-582-400-011 RPS6U 72VDC

200-582-600-013 RPS6U 110VDC

200-582-500-013 RPS6U 110/230 VAC

209-500-100-022 MPS1 software (used to configure cards)

CERTIFICATION

The VM600 system as described in this document is certified by TÜV® NORD to the following

levels:

• IEC 61508 Safety Integrated Level 1

• ISO 13849-1 performance level C.

A scanned copy of the safety certificate issued by TÜV® NORD is shown on the following

page (see Figure 2-1)

SAFETY ISSUES

3.1 VM600 in a Safety Related System

When a VM600 is part of a safety related system (SRS), certain configuration restrictions

must be applied. In particular:

• The output relays must be configured as de-energized to trip. Specifically:

• the relay is energized when the monitored levels are within their specified tolerances

  • Applied Materials (AMAT) 0190-04098 | 5.X Factory Interface I/O Distribution Board
  • Applied Materials (AMAT) 0190-03705 | MF Producer SE/E Interlock Module
  • Applied Materials (AMAT) 0190-02748 | Flex Scanner Transition Module
  • Applied Materials (AMAT) 0190-02362 | Mainframe Interlock 1 Relay Module
  • Applied Materials (AMAT) 0190-01227 | Intelligent Motor Control OMS Board
  • Applied Materials (AMAT) 0190-00318 | VME 486 Video Controller
  • Applied Materials (AMAT) 0130-14007 | Advanced RF Signal Assembly
  • Applied Materials (AMAT) 0130-14005 | RF Cable/Interface Assembly
  • Applied Materials (AMAT) 0130-01218 | High-Efficiency RF Interface Controller
  • Applied Materials (AMAT) 0110-77040 | Head Pneumatic Controller
  • Applied Materials (AMAT) 0110-00077 | Precision Control Module
  • AMAT 0101-57015 high-performance Next-Generation Deflection Amplifier Board
  • AMAT 0100-77040 critical Head Pneumatic Controller Board
  • AMAT 0100-76291 Data Buffer / Memory Expansion Interface
  • AMAT 0100-76290 Advanced I/O Interface Board
  • AMAT 0100-76269 Control Board / Interface Module
  • AMAT 0100-71462-01 high-performance Process Controller PCB
  • AMAT 0100-71171 Chamber Interlock Control PCB
  • AMAT 0100-71154 Semiconductor Circuit Board / Electronic Group Card
  • AMAT 0100-70034 PCB Assembly (PCBA) for Endpoint VGA I/O Interconnect.
  • AMAT 0100-38032 ESC (Electrostatic Chuck) Controller PCB
  • AMAT 0100-36035 DPS Source Match / Seriplex I/O Distribution PCB
  • AMAT 0100-35231 Seriplex I/O Distribution Module
  • AMAT 0100-35217 TC Amp Interlock PCB Module
  • AMAT 0100-35065 High-Precision Serial Isolator PCB
  • AMAT 0100-35054 Advanced Chamber Interface Module
  • AMAT 0100-20453 DeviceNet Digital I/O Interface Board
  • AMAT 0100-20100 High-Performance Semiconductor Component
  • AMAT 0100-20068 Precision CCD Image Control Board
  • AMAT 0100-20064 Advanced Semiconductor Control Module
  • Applied Materials (AMAT) 0100-20018 Advanced Communication Interface Module
  • Applied Materials (AMAT) 0100-20016 High-Performance Interface and Control Module
  • Applied Materials (AMAT) 0100-20003 Digital I/O (DI/DO) Interface Board
  • Applied Materials (AMAT) 0100-20001 System Electronics Interface (SEI) / PCB Assembly
  • Applied Materials (AMAT) 0100-11030 Chamber Hardware / Gas Distribution Component
  • Applied Materials (AMAT) 0100-11022 Semiconductor Board Card
  • Applied Materials (AMAT) 0100-11018 Advanced Interface Control Module
  • Applied Materials (AMAT) 0100-11001 Precision Analog Output Board
  • ​Applied Materials (AMAT) 0100-11000 High-Precision Analog Input Board
  • Applied Materials (AMAT) 0100-09237 Advanced Signal Interface Module
  • Applied Materials (AMAT) 0100-09204 Advanced Digital Interface Control Board
  • Applied Materials (AMAT) 0100-09172 High-Density Digital I/O Control Board
  • Applied Materials (AMAT) 0100-09137 High-Performance VME Control Module
  • Applied Materials (AMAT) 0100-09054 Precision Analog Input Board
  • Applied Materials (AMAT) 0100-09029 Turbo Interconnect Interface Module
  • AMAT 0100-03391 Precision Semiconductor Control
  • AMAT 0100-01984 | VME System Interface & Logic Controller Board
  • AMAT 0100-01363 | VME Intelligent System Control & I/O Board
  • AMAT 0100-01321 | VME DeviceNet Scanner / Interface Board
  • AMAT 0100-00793 | VME Multi-Channel Interface & Logic Board
  • AMAT 0100-00689 | VME PCB Power Module
  • AMAT 0100-00580 | VME Intelligent System Controller Board
  • AMAT 0100-00523 | VME Multi-Channel Analog-to-Digital (A/D) Board
  • AMAT 0100-00493 | VME Multi-Function System Controller Board
  • AMAT 0100-00398 | VME Interface System Control Board
  • AMAT 0100-00369 | VME 12-Channel High-Speed Stepper Motor Controller
  • ​AMAT 0100-00196 | VME System Mainframe CPU Controller Board
  • AMAT 0100-00169 | VME 12-Channel Stepper Motor Controller Board
  • AMAT 0100-00162 | VME Dual Channel Serial Communication Board
  • AMAT 0100-00137 | VME Stepper Motor Controller Interface Board
  • AMAT 0100-00075 | VME Digital Input/Output (DI/O) Interface Board
  • AMAT 0100-00007 VME Analog Input/Output Interface Board
  • AMAT 0100-00002 | VME Slave I/O Interface PCB
  • AMAT 0090-05596 High-Voltage DC Power Cable Assembly
  • AMAT 0090-01809 | High-Performance RF Power Cable Assembly
  • AMAT 0010-29958 | CCM HART 3 Mainframe Control Assembly
  • AMAT 0010-20003 System Controller Card Cage Assembly
  • AMAT 0010-11239 PVD High-Voltage Power Interface Assembly
  • AMAT 0010-09416 RF Matching Network Assembly
  • AMAT 0010-00019 Analog Power Supply Assembly
  • AMAT AS00009-02 (31-000-00940) | Precision Semiconductor Component
  • AMAT 0010-00028 Power Supply Module
  • AMAT 0330-1586A Serial Communication PCB
  • AMAT 0190-09690 Seriplex SENSORbus SPX-MUXADIO-001
  • AMAT 0190-04397 DeviceNet I/O Interface Board
  • AMAT 0190-02506 DeviceNet I/O Interface Card
  • AMAT 0090-00475 Seriplex 210 MUXADIO
  • AMAT 410-0198-1 Multi-Output Switching Power Supply
  • AMAT 0100-20458 high-reliability Configurable Interlock Personality Board
  • AMAT VAS104350-0415 Gasline Heater Control Unit
  • AMAT VME6U1V2 VMEbus Backplane Interface Module
  • AMAT 0920-01070 high-performance RF Power Generator
  • AMAT 0090-76133A VME Single Board Computer (SBC)
  • AMAT 0190-24115 DeviceNet I/O Interface Card
  • AMAT 0190-37607 Backplane / Base Board Assembly
  • AMAT 0190-32372 Analog Input/Output (I/O) Board
  • AMAT 0190-09956 Loadlock Interface PCB Base Assembly
  • AMAT 0190-07908 four-channel DeviceNet Interface Card
  • AMAT 0190-07905 (UPS) control board
  • AMAT 0190-07502 Precision Controller / Interface Board
  • AMAT 0190-03680 I/O Backplane
  • AMAT 0190-02200 Water Leak Detection Control Board
  • AMAT 0100-76124 Digital I/O Board Assembly
  • AMAT 0100-35563 Leak Detector Configuration PCB
  • AMAT 0100-35250 Chamber Interface DPS Centura PCB
  • AMAT 0100-35124 Seriplex I/O Distribution Board
  • AMAT 0100-35058 Loadlock Interlocks PCB
  • AMAT 0100-20213 RF Match Detector PCB
  • AMAT 0100-20063 Interface PCB Assembly
  • AMAT 0100-09225 TC AMP/INTERLOCK PCB
  • AMAT 0100-09153 Gas Panel Interface PCB
  • AMAT 0100-09127 Loader Interconnect Board
  • AMAT 0100-09009 Buffer I/O PCB Card
  • AMAT 0100-02813 Signal Conditioning Board
  • AMAT 0100-01911 AC Gas Heater Control Board
  • AMAT 0100-01708 Pedestal Integration PCB
  • AMAT 0100-00658 300mm RTP Controller Distribution PCB
  • AMAT 0100-00582 Gas Panel Controller Backplane
  • AMAT 0100-00049 Analog Signal Conditioner
  • AMAT 0100-00008 Control Interface Module
  • AMAT 0090-03402 DC Power Supply / Power Module
  • AMAT 0090-01248 DC Power Supply / Power Module
  • AMAT 0090-76109 RF Matching / Capacitor Assembly
  • AMAT 0101-57106 Substrate Voltage Board
  • AMAT 0101-57014 Deflection-Amplifier PCB
  • AMAT 0101-57012 AKT Column Control PCB (COL-C 50-10)
  • AMAT AKT 0241-58482 PCB
  • AMAT 0241-58255 REV05 PCB
  • AMAT 0161-57042 AKT framework
  • AMAT 0101-57196 electronic control board
  • AMAT 0101-57178 Digital Input / Interface PCB
  • AMAT 0101-57162 electronic control board
  • AMAT 0101-57127 P-DRV (Power Driver Board)
  • AMAT 0101-57126 D-AMP 50-06 (Digital/Analog Amplifier)
  • AMAT 0101-57125 AKT COL-C Communication Board
  • AMAT 0101-57120 D-OUT 50-32 (Digital Output Board)
  • AMAT 0101-57112 D-IN 50-32 (Digital Input Board)
  • AMAT 0101-57102 electronic control board