EMERSONOvation™ VHF Power Delivery System Leading power technology to enable advanced dielectric etch and PVD processes

Any Process Environment

The Ovation system is compact 

in size for easy installation and 

seamless integration into your new 

or existing processes. The small 

product footprint maximizes your 

chamber design flexibility.

Communication Options

This power-delivery system offers an 

array of interfacing options, including 

analog and RS-232 (AE Bus) interfaces. 

RS-232 interfaces, when used with 

the optional AE® Virtual Front Panel 

(VFP) software package, allow data 

visualization of many internal source 

parameters and fault conditions.

Reliability & Compliance

The Ovation power-delivery 

system has received the following 

safety certifications:

• CE 73/23/EEC & 89/336/EEC

• IEC/EN 61010-1

• CSA C22.2 No. 1010.1

• ANSI/ISA-82.02.01

• NRTL/C

• SEMI F47

• EN 55011, EN61326, and 47 CFR

Value-Added Options

Virtual Front Panel

AE’s optional VFP graphical computer 

interface gives you the ability to 

perform critical functions dynamically, 

and in real time, including:

• Process setup

• Troubleshooting

• Operational control

• Data visualization

Navigator™ Matching Network

Advanced Energy’s Navigator™

matching network provides advanced 

match technology for rapid, accurate, 

and reliable matching from an 

RF generator to the processing 

tool across a wide range of load 

impedances. This versatile matching 

network optimizes delivered power 

to semiconductor, flat panel display, 

and MEMs manufacturing processes, 

including CVD, HDP-CVD, and 

chamber clean applications. Equipped 

with microprocessor-controlled 

stepper motor circuitry and digital, 

user-selectable tuning algorithms, 

the Navigator matching network 

minimizes reflected power by 

automatically tuning the complex 

impedance of a coupled plasma. The 

network’s digital scheme delivers 

superior performance over traditional 

analog-based tuning methods, which 

are less consistent and accurate. An 

optional, internal Z’Scan® RF sensor 

provides real-time measurement 

and analysis of process power 

and impedance, enabling process 

engineers to identify and significantly 

reduce process variability—a 

competitive advantage over other 

matching networks without real-time 

monitoring capability. In addition, the 

Navigator matching network features 

embedded instrumentation that 

permits process engineers to exercise a 

level of electrostatic chuck control and 

a level of process-recipe optimization 

not possible with non-embedded, 

separate instrumentation. Moreover, 

with AE’s VFP software, process 

engineers can monitor and command 

the matching network through a 

personal computer—enabling a level 

of control not previously available.

Sweep Frequency

The Ovation 3060 sweep frequency 

incorporates direct digital synthesis 

(DDS) technology for control of 

its operating frequency when the 

power system is mismatched. This 

field-proven, robust technology has 

been incorporated into AE products 

since 1996. The frequency can be 

programmed to dither over a predetermined range, enable plasma 

ignition, and minimize the mismatch 

to the power system during plasma 

processing. The DDS operating 

parameters can be set via an RS232 or Ethernet port and are stored 

indefinitely in non-volatile RAM.

General Specifications

Physical

Size

Up to 2.7 kW 16.5 cm (H) x 24.0 cm (W) x 59.7 cm (D)

6.5" (H) x 9.45" (W) x 23.5" (D)

(Does not include connectors and handles)

Above 4.5 kW 19.5 cm (H) x 43.9 cm (W) x 64.4 cm (D)

7.68" (H) x 17.30"(W) x 25.35" (D)

(Does not include connectors and handles)

Weight < 29.5 kg (65 lb) max for power up to 2.7 kW

< 65.9 kg (145 lb) max for powers higher than 2.7 kW

RF Output Connector Type HN female at 2.7 kW/ QRM F for 4.5 kW

User Interface Connector 25-pin, sub-D, female

Remote Digital Interface 

(AE Bus)

9-pin, sub-D, female

Electrical

Input Power 

Line Voltage 180 to 229 VAC (208 V nominal), 3 Φ, 4-wire, no neutral connection required

Line Frequency 50/60 Hz

RF Output 

Full-Rated Output Power 2.7 to 4.5 kW, depending on model

Accuracy +3% or 20 W, whichever is greater

Optional V and I Outputs Available for non-50-Ω power measurement

Frequency 60 MHz